PET polymer ablation using excimer laser for nozzle plate application

Materials Science and Technology

Volumn 23, Issue 8, 2007, Pages 980-986

  Pan, C T ^a   Yang, H ^b   Wei, M K ^c   Chang, F Y ^d  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^d INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

248 nm excimer laser; Microholes; Nozzle plate; PET

Indexed keywords

EXCIMER LASERS; LASER ABLATION; LASER APPLICATIONS; MASKS; POLYETHYLENE TEREPHTHALATES;

LASER MACHINING QUALITY; MICROHOLES; NOZZLE PLATES; PHOTOMASK PROJECTION;

POLYMER FILMS;

EID: 36048998140     PISSN: 02670836     EISSN: None     Source Type: Journal    
DOI: 10.1179/174328407X166678     Document Type: Article

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