Observation of characteristics of magnetic neutral loop discharge plasma appearing at antenna in RF circuit

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 11, 2007, Pages 7475-7477

  Tsuboi, Hideo ^a   Ogata, Seiji ^a  

^a ULVAC INC   (Japan)

Author keywords

Antenna; Equivalent circuit; High voltage; ICP; Inductively coupled plasma; Magnetic neutral loop discharge; NLD; Plasma diagnostics; Vpp

Indexed keywords

CIRCUIT SIMULATION; EQUIVALENT CIRCUITS; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELD EFFECTS; PLASMA DIAGNOSTICS;

EQUIVALENT CIRCUIT MODELS; MAGNETIC NEUTRAL LOOP DISCHARGE; PEAK-TO-PEAK VOLTAGES;

ELECTRIC DISCHARGES;

EID: 35948962783     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.7475     Document Type: Article

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