Observation of induction power dependence on the magnetic neutral loop discharge plasma thermalization phenomena

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 10, 1997, Pages 6540-6544

  Tsuboi, Hideo ^a   Hayashi, Toshio ^a   Uchida, Taijiro ^a  

^a ULVAC INC   (Japan)

Author keywords

Bi Maxwellian; Energy distribution; High energy tail; Magnetic neutral line (loop) discharge; Maxwellian; NLD; Thermalization

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; MAGNETIC FIELD EFFECTS;

NEUTRAL LOOP DISCHARGE (NLD) PLASMAS; PLASMA DISCHARGES;

PLASMA HEATING;

EID: 0031248191     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.6540     Document Type: Article

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