First developments for photonics integrated on plasma-polymer-HMDSO: Single-mode TE00-TM00 straight waveguides

Optical Materials

Volumn 30, Issue 4, 2007, Pages 657-661

  Begou, T ^a   Beche B ^b   Goullet, A ^a   Landesman, J P ^a   Granier, A ^a   Cardinaud, C ^a   Gaviot, E ^c   Camberlein, L ^c   Grossard, N ^d   Jezequel G ^b   Zyss, J ^e  

^a UNIVERSITÉ DE NANTES   (France)

^b UNIVERSITÉ DE RENNES 1   (France)

^c UNIVERSITÉ DU MAINE   (France)

^d IXblue   (France)

^e LABORATOIRE DE PHOTONIQUE QUANTIQUE ET MOLÉCULAIRE   (France)

Author keywords

Ellipsometry; Integrated photonics; Plasma process and deposition; Plasma polymer HMDSO; Waveguides

Indexed keywords

ELLIPSOMETRY; OPTICAL LOSSES; PARAMETER ESTIMATION; PHOTONICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRESS ANALYSIS;

INTEGRATED PHOTONICS; ORGANOSILICON; PLASMA PROCESS AND DEPOSITION; PLASMA-POLYMER-HMDSO;

PLASMA FILLED WAVEGUIDES;

EID: 35649016671     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2007.02.049     Document Type: Article

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