Time-optimal motion control of piezoelectric actuator: STM application

Proceedings of the American Control Conference

Volumn 5, Issue , 2004, Pages 4849-4854

  Xu, Yongkai ^a   Meckl, Peter H ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PIEZOELECTRIC ACTUATORS; POINT-TO-POINT MOTION PROBLEMS; SAMPLING RATE; SCANNING PRECISION;

ACTUATORS; ALGORITHMS; CONTROL EQUIPMENT; DYNAMICS; HYSTERESIS; MATRIX ALGEBRA; PIEZOELECTRIC DEVICES; PROBLEM SOLVING; SCANNING TUNNELING MICROSCOPY;

MOTION CONTROL;

EID: 8744286557     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2004.182720     Document Type: Conference Paper

References (15)

1. H. Perez, Q. Zou, and S. Devasia, "Design and control of optimal feedforward trajectories for scanners: STM example," Proceedings of the American Control Conference, May 2002, pp. 2305-2312.
2. D. Croft, G. Shedd, and S. Devasia, "Creep, hysteresis, and vibration compensation for piezo-actuators: atomic force microscopy application," Proceedings of the American Control Conference, June 2000, pp. 2123-2128.
3. D. Croft, and S. Devasia, "Vibration compensation for high speed scanning tunneling microscopy," Review of Scientific Instruments, Vol. 70, No. 12, December 1999, pp. 4600-4605.
4. S. Salapaka, A. Sebastian, J.P. Cleveland, and M.V. Salapaka, "Design, identification and control of a fast nanopositioning device," Proceedings of the American Control Conference, May 2002. pp. 1966-1971.
5. G. Schitter, P. Menold, H.F. Knapp, F. Allgoewer, and A. Stemmer, "High performance feedback for fast scanning atomic force microscopy," Review of Scientific Instruments, Vol. 72, No. 8, August 2001, pp. 3320-3327.
6. X. Tan, and J.S. Baras, "A robust control framework for smart actuators," Proceedings of the American Control Conference, June 2003. pp. 4645-4650.
7. C. J. Li, H.S.M. Beigi, S. Li, and J. Liang, "Nonlinear piezo-actuator control by learning self-tuning regulator," Transactions of the ASME, Vol. 115, December 1993, pp. 720-723.
8. M.C. Reynolds, and P. Meckl, "The applica-tion of command shaping to the tracking problem," Proceedings of the American Control Conference, June 2003, pp. 3148-3153.
9. I.D. Mayergoyz. Mathematical Models of Hysteresis. Springer-Verlag, New York, 1991.
10. I.D. Mayergoyz, and G. Friedman, "Generalized Preisach model of hysteresis," IEEE Transactions on Magnetics, Vol. 24, No. 1, Jan. 1988, pp. 212-217.
11. G. Tao, and P.V. Kokotovic. Adaptive control of systems with actuator and sensor nonlinearities. Wiley, 1996.
12. D. Hughes, J.T. Wen, "Preisach modeling and compensation for smart material hysteresis," in Active Materials and Smart Structures, Proceedings of SPIE, Vol. 2427, 1994, pp. 50-64.
13. R. Venkataraman, P. S. Krishnaprasad, "Approximate inversion of hysteresis: theory and numerical results," Proceedings of the 39th IEEE Conference on Decision and Control, 2000, pp. 4448-4454.
14. X. Tan, R. Venkataraman, and P. S. Krishnaprasad, "Control of hysteresis: theory and experimental results," in Modeling, Signal Processing, and Control in Smart Structures, Proceedings of SPIE, Vol. 4326, 2001, pp. 101-112.
15. L. Y. Pao, "Minimum-time control characteristics of flexible structures," Journal of Guidance, Control, and Dynamics, Vol. 19, No. 1, January-February 1996, pp. 123-129.