Fabrication of ultrathin film capacitors by chemical solution deposition

Journal of Materials Research

Volumn 22, Issue 10, 2007, Pages 2868-2874

  Brennecka, Geoff L ^a   Tuttle, Bruce A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; DEPOSITION; HYSTERESIS LOOPS; PERMITTIVITY; SPIN COATING; THIN FILMS;

CHEMICAL SOLUTION DEPOSITION; LEAD LANTHANUM ZIRCONATE TITANATE (PLZT); ULTRATHIN FILM CAPACITORS;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 35448975193     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0371     Document Type: Article

References (27)

1. N. Setter, D. Damjanovic, L. Eng, G. Fox, S. Gevorgian, S. Hong, A. Kingon, H. Kohlstedt, N.Y. Park, G.B. Stephenson, I. Stolitchnov, A.K. Taganstev, D.V. Taylor, TYamada, and S. Streiffer: Ferro-electric thin films: Review of materials, properties, and applications. J. Appl. Phys. 100, 051606 (2006).
2. S. Trolier-McKinstry and P. Muralt: Thin film piezoelectrics for MEMS. J. Electroceram. 12, 7 (2004).
3. G.L. Brennecka, W. Huebner, B.A. Tuttle, and P.G. Clem: Use of stress to produce highly oriented tetragonal lead zirconate titanate (PZT 40/60). J. Am. Ceram. Soc.. 87, 1459 (2004).
4. C.H. Ahn, K.M. Rabe, and J-M. Triscone: Ferroelectricity at the nanoscale: Local polarization in oxide thin films and heterostructures. Science 303, 488 (2003).
5. A. Rudiger, T. Schneller, A. Roelofs, S. Tiedke, T. Schmitz, and R. Waser: Nanosize ferroelectric oxides-tracking down the super-paraelectric limit. Appl. Phys. A 80, 1247 (2005).
6. 3 films. Appl. Phys. Lett. 86, 102907 (2005).
7. D.D. Fong and C. Thompson: In-situ synchrotron x-ray studies of ferroelectric thin films. Annu. Rev. Mater. Res. 36, 431 (2006).
8. V.K. DeMarquis, R.A. Brooks, and J.O. Harris: Reliability and Volumetric Evaluation of Ceramic Capacitors for Pulse-Discharge Applications. (Sandia National Laboratories, SAND Report, SAND2003-0241C, 2003).
9. B.A. Tuttle and R.W. Schwartz: Solution deposition of ferroelectric thin films. MRS Bull. 6, 49 (1996).
10. 3 thin films by sol gel processing: Electrical, optical, and electro-optic properties. J. Appl. Phys. 64, 2717 (1988).
11. T. Tani and D.A. Payne: Lead oxide coatings on sol-gel-derived lead lanthanum zirconate titanate thin layers for enhanced crystallization into the perovskite structure. J. Am. Ceram. Soc. 77, 1242 (1994).
12. K.T. Miller, F.F. Lange, and D.B. Marshall: The instability of polycrystalline thin films. J. Mater. Res. 5, 151 (1990).
13. A. Seifert, A. Vojta, J.S. Speck, and F.F. Lange: Microstructural instability in single-crystal thin films. J. Mater. Res. 11, 1470 (1996).
14. M.H. Frey and D.A. Payne: Grain-size effect on structure and phase transformations for barium titanate. Phys. Rev. B 54, 3158 (1996).
15. T.M. Shaw, S. Trolier-McKinstry, and P.C. McIntyre: The properties of ferroelectric films at small dimensions. Annu. Rev. Mater. Sci. 30, 263 (2000).
16. J.H. Park and S. Trolier-McKinstry: Dependence of dielectric and piezoelectric properties on film thickness for highly (100)-oriented lead magnesium niobate-lead titanate (70/30). J. Mater. Res. 16, 268 (2001).
17. M.H. Frey, Z. Xu, P. Han, and D.A. Payne: The role of interfaces on an apparent grain size effect on the dielectric properties for ferroelectric barium titanate ceramics. Ferroelectrics 206-207, 337 (1998).
18. S.V. Kalinin and D.A. Bonnell: Local potential and polarization screening on ferroelectric surfaces. Phys. Rev. B 63, 125411 (2001).
19. M. Stengel and N.A. Spaldin: Origin of the dielectric dead layer in nanoscale capacitors. Nature 443, 679 (2006).
20. 3 thin films by donor doping. J. Am. Ceram. Soc. 77, 3000 (1994).
21. D.B. Dimos and C.H. Mueller: Perovskite thin films for high-frequency capacitor applications. Annu. Rev. Mater. Sci. 28, 397 (1998).
22. D.J. Wouters, G. Willems, G. Groeseneken, H.E. Maes, K. Brooks, and R. Klissurska: The influence of dopants on the leakage current in PZT thin-film ferroelectric capacitors, in Science and Technology of Electroceramic Thin Films, Vol. 284, NATO Advanced Study Institutes, edited by O. Auciello and R. Waser (Kluwer, London, UK, 1995), p. 279.
23. G.L. Brennecka, C.M. Parish, B.A. Tuttle, and L.N. Brewer: Reversibility of the perovskite ↔ pyrochlore transition in lead zirconate titanate-based thin films (2007, in preparation).
24. 3 thin films: I, role of Pb-rich intermediate phases. J. Am. Ceram. Soc. 77, 2332 (1994).
25. [i#xPb formation during the pyrolysis of lead zirconate titanate thin films. J. Am. Ceram. Soc. 85, 641 (2002).
26. B.A. Tuttle, G.L. Brennecka, D.P. Williams, M.A. Rodriguez, and T.J. Headley: High energy density PLZT thin film capacitors, in Advanced Dielectric, Piezoelectric, and Ferroelectric Thin Films, edited by B.A. Tuttle, C. Chen, Q. Xia, and R. Ramesh (Ceram. Trans. 162, Indianapolis, IN, 2004), p. 17.
27. D.P. Williams, B.A. Tuttle, R.U. Grubbs, and P.G. Clem: Fabrication and characterization of integrated PLZT thin film capacitors via aerosol spray deposition, in Ceramic Inter-connect Technology: The Next Generation II (Proceedings of the IMAPS/ACerS Ceramic Interconnects Conference, Denver, CO, 2004).