Template-directed CVD of dielectric nanotubes

Chemical Vapor Deposition

Volumn 9, Issue 1, 2003, Pages 26-33

  Zambov, Ludmil ^a,b   Zambova, Adriana ^a   Cabassi, Marco ^a   Mayer, Theresa S ^a  

^a The Pennsylvania State University   (United States)

^b DOW CORNING CORPORATION   (United States)

Author keywords

CVD modeling; Dielectrics; ECR PECVD; Modeling methods; Nanotubes

Indexed keywords

BIOSENSORS; DIELECTRIC MATERIALS; ELECTRON CYCLOTRON RESONANCE; FABRICATION; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE;

DIELECTRIC NANOTUBES; NANOMETER-SCALE STRUCTURES; NANOWIRES;

NANOTUBES;

EID: 3543118475     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200290003     Document Type: Article

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