Thermodynamic approach to optimization of SrTiO3 chemical vapor deposition from volatile metalorganic precursors

Inorganic Materials

Volumn 40, Issue 5, 2004, Pages 516-521

  Golubenko, A N ^a   Yakovkina, L V ^b   Smirnova, T P ^b   Shubin, Yu V ^b   Morozova, N B ^b   Danilovich, V S ^b  

^a NOVOSIBIRSK STATE UNIVERSITY   (Russian Federation)

^b NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; METAL; NITROGEN; OXYGEN; STRONTIUM; TITANIUM; VOLATILE AGENT;

ANALYTIC METHOD; ARTICLE; CONCENTRATION (PARAMETERS); CRYSTAL; FILM; FLOW RATE; TEMPERATURE; THERMODYNAMICS; VAPOR;

EID: 3543085224     PISSN: 00201685     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:INMA.0000027599.14467.52     Document Type: Article

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