On thermodynamic equilibria of solid BN and gas phases in the B-N-H-Cl-He system

Thin Solid Films

Volumn 293, Issue 1-2, 1997, Pages 11-16

  Golubenko, A N ^a   Kosinova, M L ^b   Titov, V A ^b   Titov, A A ^b   Kuznetsov, F A ^b  

^a NOVOSIBIRSK STATE UNIVERSITY   (Russian Federation)

^b NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

Boron nitride; Chemical vapour deposition (CVD); Computer simulation

Indexed keywords

CHEMICAL MODIFICATION; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; COMPUTER SIMULATION; PHASE DIAGRAMS; PHASE EQUILIBRIA; PHASE TRANSITIONS; PRESSURE EFFECTS; THERMAL EFFECTS; THERMODYNAMIC STABILITY;

QUASI EQUILIBRIUM PROCESSES;

CUBIC BORON NITRIDE;

EID: 0030682310     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09071-2     Document Type: Article

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