Nano-bubble flotation technology with coagulation process for the cost-effective treatment of chemical mechanical polishing wastewater

Separation and Purification Technology

Volumn 58, Issue 1, 2007, Pages 61-67

  Tsai, Jen Chieh ^a   Kumar, Mathava ^a   Chen, Shen Yi ^b   Lin, Jih Gaw ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

Chemical mechanical polishing; Coagulation; Flotation; Nano bubble; Response surface methodology

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CHEMICALS REMOVAL (WATER TREATMENT); COAGULATION; FLOTATION AGENTS; TURBIDITY; WASTEWATER RECLAMATION;

HYDRAULIC RETENTION TIME (HRT); NANO-BUBBLE FLOTATION TECHNOLOGY (NBFT); RESPONSE SURFACE METHODOLOGY;

WASTEWATER TREATMENT;

EID: 35349023324     PISSN: 13835866     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.seppur.2007.07.022     Document Type: Article

References (35)

1. Lin S.H., and Yang C.R. Chemical and physical treatments of chemical mechanical polishing wastewater from semiconductor fabrication. J. Hazard. Mater. 108 (2004) 103-109
2. Yang G.C.C., and Yang T.Y. Reclamation of high quality water from treating CMP wastewater by a novel crossflow electrofiltration/electrodialysis process. J. Membr. Sci. 233 (2004) 151-159
3. Hu C.Y., Lo S.L., Li C.M., and Kuan W.H. Treating chemical mechanical polishing (CMP) wastewater by electro-coagulation-flotation process with surfactant. J. Hazard. Mater. 120 (2005) 15-20
4. Yang G.C.C., Yang T.Y., and Tsai S.H. Crossflow electro-microfiltration of oxide-CMP wastewater. Water Res. 37 (2003) 785-792
5. Lai C.L., and Lin S.H. Electrocoagulation of chemical mechanical polishing (CMP) wastewater from semiconductor fabrication. Chem. Eng. J. 95 (2003) 205-211
6. Lai C.L., and Lin S.H. Treatment of chemical mechanical polishing wastewater by electrocoagulation: system performances and sludge settling characteristics. Chemosphere 54 (2004) 235-242
7. 2) by column pressurized flotation technology, MS thesis, Department of Resources Engineering, National Cheng-Kung University, Taiwan, 2000.
8. Belongia B.M., Haworth P.D., Baygents J.C., and Raghvan S. Treatment of alumina and silica chemical mechanical polishing waste by electrodecantation and electrocoagulation. J. Electrochem. Soc. 146 (1999) 4124-4130
9. Golden J.H., Small R., Pagan L., Shang C., and Raghvan S. Evaluating and treating CMP wastewater. Semiconductor Int. 23 (2000) 92-103
10. Rubio J., Souza M.L., and Smith R.W. Overview of flotation as a wastewater treatment technique. Miner. Eng. 15 (2002) 139-155
11. Zouboulis A.I., and Matis K.A. Removal of cadmium from dilute solution by flotation. Water Sci. Technol. 31 (1995) 315-326
12. Huang C.J., and Liu J.C. Precipitation flotation of fluoride-containing wastewater from semi-conductor manufacture. Water Res. 33 (1999) 3403-3412
13. Wang Y., Guo J., and Tang H. Pilot testing of dissolved air flotation (DAF) in a highly effective coagulation-flocculation integrated (FRD) system. J. Environ. Sci. Health A 37 1 (2002) 95-111
14. Edzwald J.K. Principles and applications of dissolved air flotation. Water Sci. Technol. 31 (1995) 1-23
15. Al-Shamrani A.A., James A., and Xiao H. Separation of oil from water by dissolved air flotation. Colloid Surf. A: Physicochem. Eng. Aspect 209 (2002) 15-26
16. Fakushi K., Tambo N., and Matsui Y. A kinetic model for dissolved air flotation in water and wastewater treatment. Water Sci. Technol. 31 (1995) 37-47
17. Chuang T.C., Huang C.J., and Liu J.C. Treatment of semiconductor wastewater by dissolved air flotation. J. Environ. Eng. 128 (2002) 974-980
18. Takghashi T., Miyahara T., and Mochizuki H. Fundamental study of bubble formation in dissolved air pressure flotation. J. Chem. Eng. Jpn. 12 (1979) 275-280
19. T. Zabel, Flotation in water treatment. In: K.J. Ives (Ed.), The Scientific Basis of Flotation, NATO ASI Series, Martinas Nijhoff, Boston, USA, pp. 349-377.
20. De Rijik S.E., Vander Graaf J.H., and Blanken J.G. Bubble size in flotation thickening. Water Res. 28 (1994) 465-473
21. Wollen P.S. Reusing tertiary effluent after treatment with a DAF and sandfilter system. Paper Technol. 38 (1994) 18-20
22. Valade M.T., Edzwald J.K., Tobiason J.E., Dahtquist J., Hedberg T., and Amato T. Pretreatment effects on particle removal by flotation and filtration. J. AWWA 88 12 (1996) 35-47
23. Rigas F., Panteleos P., and Laoudis C. Central composite design in a refinery's wastewater treatment by air flotation. Global Nest 2 (2000) 235-253
24. Standard Methods for the Examination of Water and Wastewater, 19th ed., APHA, AWWA and WEF, Washington, DC, USA, 2005.
25. Den W., and Huang C. Electrocoagulation for removal of silica nano-particles from chemical-mechanical-planarization wastewater. Colloid Surf. A: Physicochem. Eng. Aspects 254 (2005) 81-89
26. Bayraktar E. Response surface optimization of the separation of Dl-tryptophan using an emulsion liquid membrane. Process Biochem. 37 (2001) 169-175
27. Can M.Y., Kaya Y., and Algur O.F. Response surface optimization of the removal of nickel from aqueous solution by cone biomass of Pinus sylvestris. Bioresour. Technol. 97 (2006) 1761-1765
28. Luan Z., Qu J., and Tang H. Species stability and electro-kinetic characteristics of polyaluminium chloride in coagulation and flocculation processes. Environ. Chem. (China) 16 6 (1997) 506-514
29. Perea-Carpio R., Gonzalez-Caballeero F., and Bruque J.M. On the interactions at interfaces in fluorite flotation. Int. J. Miner. Process. 23 (1988) 229-240
30. Lin S.H., and Kiang C.D. Combined physical, chemical and biological treatments of wastewater containing organics from a semiconductor plant. J. Hazard. Mater. B97 (2003) 159-171
31. Chen S., Chang T., and Lin C. Silica pretreatment for a RO brackish water source with high magnesium. Water Sci. Technol. 6 4 (2006) 179-187
32. Chung T.H., and Kim D.Y. Significant of pressure and recirculation in sludge thickening by dissolved air flotation. Water Sci. Technol. 36 (1997) 223-230
33. Ross C.C., Smith B.M., and Valentine G.E. Rethinking dissolved air flotation (DAF) design for industrial pretreatment. WEF and Purdue University Industrial Wastes Technical Conference (2000)
34. 2+ ions from aqueous solution by froth flotation. Sep. Sci. Technol. 29 (1994) 867-886
35. Sanciolo P., Harding I.H., and Mainwaring D.E. The removal of chromium, nickel and zinc from electroplating wastewater by adsorbing colloid flotation with a sodium dodecylsulfate/dodecanoic acid mixture. Sep. Sci. Technol. 27 (1992) 375-388