Assembling carbon nanotube bundles using transfer process for fine-pitch electrical interconnect applications

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 2007, Pages 1981-1985

  Zhu, Lingbo ^a   Moon, Kyoung Sik ^a   Bertram, Brian ^a   Hess, Dennis W ^a   Wong, C P ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

I/O DENSITY; THERMAL INTERFACE; THERMAL-MECHANICAL RELIABILITY;

CHEMICAL VAPOR DEPOSITION; ELECTRIC CURRENT CARRYING CAPACITY (CABLES); ELECTRONICS PACKAGING; INTEGRATED CIRCUITS; OPTICAL INTERCONNECTS; TEMPERATURE CONTROL;

CARBON NANOTUBES;

EID: 35348870939     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2007.374073     Document Type: Conference Paper

References (23)

1. Dai, HJ., Kong J., et al. "Controlled Chemical Routes to Nanotube Architectures, Physics, and Devices", J. Phys. Chem. B, Vol. 103, No. 51 (1999), pp. 11246-11255.
2. Hamada, N., Sawada, S.-I., Oshiyama, A., "New One-Dimensional Conductors: Graphite Microtubule", Phys. Rev. Lett., Vol. 68, No. 10 (1992), pp. 1579-1581.
3. Saito, R., Fujita, M., Dresselhaus, G., Dresselhaus, M. S., "Electronic Structure of Chiral Graphene Tubules", Appl. Phys. Lett., Vol. 60, No. 18 (1992), pp. 2204-2206.
4. Hafner, J. H.; Cheung C. L.; "High-yield Assembly of Individual Signle-Walled Carbon Nanotube Tips for Scanning Probe Microscopy", J. Phys. Chem. B, Vol. 105, No. 4 (2001), pp. 743-746.
5. Tans, S. J.; Verschueren, A. R. M.; Dekker, C. "Room-Temperature Transistor Based on a Single Carbon Nanotube", Nature, Vol. 393, (1998), pp. 49-51.
6. Bonard, J. M., Salvetat, J. P., Stöckli, T., Forro, L., Chatelain, A., "Field Emission From Carbon Nanotubes: Perspective for Applications and Clues to the Emission Mechanism", Appl. Phys. A, Vol. 69, No. 3 (1999), pp.245-254.
7. Hoenlein, W.; Kreupl, F; "Carbon Nanotube Applications in Microelectronics", IEEE T. Compon. Pack. T., Vol. 27, No. 4 (2004), pp. 629-634.
8. S. Frank, P. Poncharal, Z. L. Wang, and W. A. de Heer, "Carbon Nanotube Quantum Resistors", Science, Vol. 280, No. 5370 (1998), pp. 1744-1746.
9. Baughman, R H.; Zakhidov, A. A, et al, "Carbon Nanotubes - the Route Toward Applications", Science, Vol. 297, No. 5582 (2002), pp. 787-792.
10. Kim, P., Shi, L., McEuen, P. L., "Thermal Transport Measurements of Individual Multiwalled Nanotubes", Phys. Rev. Lett., Vol. 87, No. 21 (2001), pp. 215502-1-4.
11. Graham, A. P., Duesberg, G. S. et al, "Towards the Integration of Carbon Nanotubes in Microelectronics", Diam. Relat. Mater., Vol. 13, No. 4-8 (2004), pp. 1296-1300.
12. Kreupl, F.; Graham, A. P. et al, "Carbon Nanotubes in Interconnect Applications", Microelectron. Eng., Vol. 64, No. 1-4 (2002), pp. 399-408.
13. Homma, Y., Yamashita, T., Kobayashi, Y., et al, "Interconnection of Nanostructures Using Carbon Nanotubes", Physica B, Vol. 323, No. 1 (2002), pp. 122-123.
14. McEuen, P. L., Fuhrer, M. S., Park, H., "Single-Walled Carbon Nanotube Electronics", IEEE T. Nanotechnol., Vol. 1, No. 1 (2002), pp. 78-85.
15. Dresselhaus, M. S., et al., Carbon nanotubes: Synthesis-Structure, Properties and Applications. Springer (Berlin, 2001), pp. 147-168.
16. Ren, Z. F., et al, "Synthesis of Large Arrays fo Well-Aligned Carbon Nanotubes on Glass", Science, Vol. 282, No. 5391, pp. 1105-1107.
17. Wei, B. Q., et al., "Assembly of Highly Organized Carbon Nanotube Architectures by Chemical Vapor Deposition", Chem. Mater., Vol. 15, No. 8 (2003), pp. 1598-1606.
18. Cao, A.; Baskaran, R.; Frederick, M. J.; Turner, K.; Ajayan, P. M.; Ramanath, G., "Direction-selective and length-tunable in-plane growth of carbon nanotubes", Adv. Mater., Vo. 15,No. 13 (2003), pp. 1105-1109.
19. Collins, P. G., Arnold, M. S., Avouris, P., "Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breackdown", Science, Vol. 292, No. 5517 (2001), pp. 706-7096.
20. Li, H. J., Lu, W. G., Li, J. J., Bai, X. D., Gu, C. Z., "Multichannel Ballistic Transport in Multiwall Carbon Nanotubes", Phys. Rev. Lett., Vol. 95, No. 8 (2005), pp. 086601-1-4.
21. Ajayan, P. M., et al., "Opening Carbon Nanotubes With Oxygen and Implications for Filling", Nature, Vol. 362 (1993), pp. 522-525.
22. Tsang, S. C., et al, "Thinning and Opening of Carbon Nanotubes by Oxidation Using Carbon Dioxide", Nature, Vol. 362 (1993), pp. 520-522.
23. Zhu, L., Xiu, Y., Hess, D. W., Wong, C. P., "Aligned Carbon Nanotube Stacks by Water-Assisted Selective Etching", Nano Lett., Vol. 5, No. 12 (2005), pp. 2641-2645.