Simulation of growth dynamics for nearly epitaxial films

Journal of Crystal Growth

Volumn 308, Issue 2, 2007, Pages 366-375

  Nilsen, Ola ^a   Karlsen, Ole Bjørn ^a   Kjekshus, Arne ^a   Fjellvåg, Helmer ^a  

^a UNIVERSITY OF OSLO   (Norway)

Author keywords

A1. Epitaxial film; A1. Growth dynamics; A1. Growth models; A1. Morphological stability; A1. Roughening; A1. Simulation; A3. ALD; A3. Atomic layer deposition; A3. Atomic layer epitaxy

Indexed keywords

ATOMIC LAYER EPITAXY; COMPUTER SIMULATION; CRYSTALLITES; MATHEMATICAL MODELS; NUCLEATION; SEMICONDUCTOR GROWTH;

GROWTH DYNAMICS; GROWTH MODELS; MORPHOLOGICAL STABILITY;

EPITAXIAL FILMS;

EID: 35348835392     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.08.001     Document Type: Article

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