Modeling spatial gate length variation in the 0.2μm to 1.15mm separation range

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6521, Issue , 2007, Pages

  Friedberg, Paul ^a   Cheung, Willy ^b   Cheng, George ^a   Tang, Qian Ying ^a   Spanos, Costas J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Department of Earth and Environmental Sciences   (United States)

Author keywords

Circuit performance; Gate length variation; Process control; Spatial correlation; Variability

Indexed keywords

CIRCUIT PERFORMANCE; GATE LENGTH VARIATION; SPATIAL CORRELATION; VARIABILITY;

CORRELATION METHODS; LITHOGRAPHY; MEASUREMENT THEORY; PROCESS CONTROL;

COMPUTER SIMULATION;

EID: 35148876045     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.710668     Document Type: Conference Paper

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