A general 4-port solution for 110 GHz on-wafer transistor measurements with or without impedance standard substrate (ISS) calibration

IEEE Transactions on Electron Devices

Volumn 54, Issue 10, 2007, Pages 2706-2714

  Wei, Xiaoyun ^a   Niu, Guofu ^a   Sweeney, Susan L ^b   Liang, Qingqing ^b   Wang, Xudong ^b   Taylor, Stewart S ^c  

^a AUBURN UNIVERSITY   (United States)

^b IBM MICROELECTRONICS   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

4 port network; Calibration; Deembedding; Error correction; Microwave on wafer measurements; On wafer parasitics; RF CMOS; Scattering parameters

Indexed keywords

CALIBRATION; CMOS INTEGRATED CIRCUITS; STANDARDS; SUBSTRATES;

DEEMBEDDING; IMPEDANCE STANDARD SUBSTRATE; MICROWAVE ON-WAFER MEASUREMENTS; ON-WAFER PARASITICS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 35148857506     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.904362     Document Type: Article

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