The investigation of a shape memory alloy micro-damper for MEMS applications

Sensors

Volumn 7, Issue 9, 2007, Pages 1887-1900

  Pan, Qiang ^a   Cho, Ngdu ^a  

^a Inha University   (South Korea)

Author keywords

MEMS; Micro damper; Pseudoelasticity; Shape memory alloy

Indexed keywords

DAMPING; ELASTICITY; ENERGY DISSIPATION; MEMS; SHAPE MEMORY EFFECT; STRAIN RATE;

CONVENTIONAL MATERIALS; ENERGY DISSIPATION ABILITY; MECHANICAL BEHAVIOR; MECHANICAL MODEL; MEMS APPLICATIONS; MICRO-DAMPER; PSEUDOELASTICITY; STRAIN AMPLITUDE;

METAL IMPLANTS;

EID: 34948869863     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7091887     Document Type: Article

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