Influence of annealing temperature and atmosphere on the properties of ITO films deposited using a powdery target

Journal of the Korean Physical Society

Volumn 51, Issue 3, 2007, Pages 1143-1146

  Lee, Jaehyeong ^a   Lim, D G ^b   Song, Woochang ^c   Yi, Junsin ^d  

^a Kunsan National University   (South Korea)

^b Chungju National University   (South Korea)

^c Kangwon National University   (South Korea)

^d Sungkyunkwan University   (South Korea)

Author keywords

Heat treatment; Indium tin oxide (ITO) film; Magnetron sputtering; Powdery target

Indexed keywords

EID: 34948861134     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.51.1143     Document Type: Article

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