Study of the tribological properties of DLC double-layer films grown by using plasma enhanced chemical-vapor deposition and closed-field unbalanced magnetron sputtering

Journal of the Korean Physical Society

Volumn 51, Issue 3, 2007, Pages 1129-1133

  Cho, Yun Hye ^a   Park, Yong Seob ^a   Cho, Hyung Jun ^a   Hong, Byungyou ^a   Choi, Won Seok ^b  

^a Sungkyunkwan University   (South Korea)

^b Hanbat National University   (South Korea)

Author keywords

Closed field unbalance magnetron sputtering; Diamond like carbon film; Multilayer; Plasma enhanced chemical vapor deposition; Tribological

Indexed keywords

EID: 34948860093     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.51.1129     Document Type: Article

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