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Volumn 99, Issue 4, 1996, Pages 273-284

Chemical, mechanical and electrical properties of CNx-films produced by reactive sputtering and N+-implantation in carbon films

(3) Laidania, N a,b Miotello, A b Perriere J c

a Centro Materiali Biofisica Medica (Italy)

b UNIVERSITY OF TRENTO (Italy)

c CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; ELASTICITY; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM GROWTH; FILM PREPARATION; GRAPHITE; HARDNESS; ION IMPLANTATION; SPUTTER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC RECOIL DETECTION; KNOOP INDENTER; SLIDING FRICTION MEASUREMENTS;

CYANIDES;

EID: 0030212747 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/0169-4332(96)00463-1 Document Type: Article

Times cited : (20)

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