Investigation of a radio-frequency inductive- coupled-plasma discharge afterglow in noble gases

Journal of Physics B: Atomic, Molecular and Optical Physics

Volumn 40, Issue 19, 2007, Pages 3823-3833

  DeJoseph Jr , C A ^a   Demidov, V I ^b   Blessington, J ^b   Koepke, M E ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; ELECTRON BEAMS; GLOW DISCHARGES; IONIZATION; PLASMA SHEATHS;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); LANGMUIR PROBE MEASUREMENTS; METASTABLE ATOMS;

INDUCTIVELY COUPLED PLASMA;

EID: 34948849731     PISSN: 09534075     EISSN: 13616455     Source Type: Journal    
DOI: 10.1088/0953-4075/40/19/003     Document Type: Article

References (21)

1. Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharge and Material Processing (New York: Wiley)
2. Chen F F and Chang J P 2002 Lecture Notes on Principles of Plasma Processing (New York: Kluwer/Plenum)
3. Overzet L J and Kleber J 1998 Plasma Sources Sci. Technol. 7 512
4. Arslanbekov R, Kudryavtsev A A and Tsendin L D 2001 Phys. Rev. E 64 016401
5. Maresca A, Orlov K and Kortshagen U 2002 Phys. Rev. E 65 056405
6. DeJoseph C A Jr, Demidov V I and Kudryavtsev A A 2005 Phys. Rev. E 72 036410
7. Demidov V I, DeJoseph C A Jr and Kudryavtsev A A 2005 Phys. Rev. Lett. 95 215002
8. Demidov V I, DeJoseph C A Jr and Kudryavtsev A A 2006 IEEE Trans. Plasma Sci. 34 825
9. Bogdanov E A, DeJoseph C A Jr, Demidov V I and Kudryavtsev A A 2006 Appl. Phys. Lett. 89 021501
10. Gorchakov S G, Uhrlandt D, Hebert M J and Kortshagen U 2006 Phys. Rev. E 73 056402
11. Hebner G A 1996 J. Appl. Phys. 80 2624
12. Tadokoro M, Hirata H, Nakano N, Petrovic Z Lj and Makabe T 1998 Phys. Rev. E 58 7823
13. Tsendin L D 1995 Plasma Sources Sci. Technol. 4 200
14. Tsendin L D, Bogdanov E A and Kudryavtsev A A 2005 Phys. Rev. Lett. 76 033502
15. Guo W and DeJoseph C A Jr 2001 Plasma Sources Sci. Technol. 10 43
16. Demidov V I, Ratynskaia S V and Rypdal K 2002 Rev. Sci. Instrum. 73 3409
17. Phelps A V and Molnar J P 1953 Phys. Rev. 89 1202
18. Kolokolov N B and Blagoev A B 1993 Phys. Usp. 36 55
19. DeJoseph C A Jr and Demidov V I 2005 J. Phys B: At. Mol. Opt. Phys. 38 3805
20. Bogdanov E A, DeJoseph C A Jr, Demidov V I, Kudryavtsev A A and Serditov K Y 2007 Plasma Sources Sci. Technol. 16 697
21. Schmeltekoff A L, Ferguson E E and Fehsenfeld F C 1968 J. Chem. Phys. 48 2966