Effect of varying the nanostructured porous-Si process parameters on the performance of Pd-doped hydrogen sensor

Sensors and Actuators, B: Chemical

Volumn 127, Issue 1, 2007, Pages 74-81

  Sekhar, P K ^a   Sine, A ^a   Bhansali, S ^a  

^a University of South Florida   (United States)

Author keywords

Annealing; Hydrogen; Palladium; Porous silicon; Silica nanowires

Indexed keywords

ANNEALING; CURRENT DENSITY; ETCHING; MORPHOLOGY; NANOWIRES; NUCLEATION; POROUS SILICON; SILICA;

HYDROGEN SENSORS; OPTIMAL PROCESS PARAMETERS; SILICA NANOWIRES;

CHEMICAL SENSORS;

EID: 34848890071     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.07.018     Document Type: Article

References (21)

1. Tsamis C., Tsoura L., Nassiopoulou A.G., Travlos A., Salmas C.E., Hatzilyberis K., and Androutsopoulos G.P. Hydrogen catalytic oxidation reaction on Pd-doped porous silicon. IEEE Sens. 2 (2002) 89-95
2. Lysenko V., Bidault F., Alekseev S., Zaitsev V., and Barbier D. Study of porous silicon nanostructures as hydrogen reservoirs. J. Phys. Chem. B 109 (2005) 19711-19718
3. 2 safety applications. Proceedings of the 10th Annual National Hydrogen Association Meeting. Vienna, VA (1999)
4. Cullis A.G., Canham L.T., and Calcott P.D.J. The structural and luminescence properties of porous silicon. J. Appl. Phys. 82 (1997) 909-965
5. Wolkin M.V., Jorne J., Fauchet P.M., Allan G., and Delerue C. Electronic states and luminescence in porous silicon quantum dots: the role of oxygen. Phys. Rev. Lett. 82 (1999) 197-200
6. Schechmer I., Ben-Chorin M., and Kux A. Gas sensing properties of porous silicon. Anal. Chem. 67 (1995) 3727-3732
7. Lin H., Gao T., Fantini J., and Sailor M.J. A porous silicon-palladium composite film for optical interferometric sensing of hydrogen. Langmuir 20 (2004) 5104-5108
8. Polishchuk V., Souteyrand E., Martin J.R., Strikha V.I., and Skryshevsky V.A. A study of hydrogen detection with palladium modified porous silicon. Anal. Chim. Acta 375 (1998) 205-210
9. Barillaro G., Bruschi P., Pieri F., and Strambini L.M. CMOS-compatible fabrication of porous silicon gas sensors and their readout electronics on the same chip. Phys. Status Solidi 204 (2007) 1423-1428
10. Lewis S.E., DeBoerb J.R., Gole J.L., and Hesketh P.J. Sensitive, selective, and analytical improvements to a porous silicon gas sensor. Sens. Actuator B 110 (2005) 54-65
11. Mahmoudia Be., Gabouze N., Haddadi M., Mahmoudia Br., Cheraga H., Beldjilali K., and Dahmanea D. The effect of annealing on the sensing properties of porous silicon gas sensor: Use of screen-printed contacts. Sensor. Actuat. B-chem. 123 (2007) 680-684
12. Garci{dotless}́a Salgado G., Di{dotless}́az Becerril T., Juárez Santiesteban H., and Rosendo Andrés E. Porous silicon organic vapor sensor. Opt. Mater. 29 (2006) 51-55
13. Luongo K., Sine A., and Bhansali S. Development of a highly sensitive porous Si based hydrogen sensor using Pd nano-structures. Sens. Actuator B 111-112 (2005) 125-129
14. Rahimi F., Irajizad A., and Razi F. Characterization of porous polysilicon impregnated with Pd as a hydrogen sensor. J. Phys. D: Appl. Phys. 38 (2005) 36-40
15. R.B. McLellan, The kinetic and thermodynamic effects of vacancy-interstitial interactions in Pd-H solutions, Acta Mater. 45 (1997) 1995-2000.
16. Araki H., Nakamura M., Harada S., Obata T., Mikhin N., Syvokon V., and Kubota M. Phase diagram of hydrogen in palladium. J. Low Temp. Phys. 134 (2004) 1145-1151
17. Wagner R.S., and Ellis W.C. Vapor-liquid-solid mechanism of single crystal growth. Appl. Phys. Lett. 4 (1964) 89-90
18. Rahimi F., and Irajizad A. Effective factors on Pd growth on porous silicon by electroless-plating: response to hydrogen. Sens. Actuator B 115 (2006) 164-169
19. Gronbeck H., Tomanek D., Kim S.G., and Rosen A. Hydrogen induced melting of palladium clusters. Z. Phys. D 40 (1997) 469-471
20. Nutzenadel1 C., Zuttel1 A., Chartouni D., Schmid G., and Schlapbach L. Critical size and surface effect of the hydrogen interaction of palladium clusters. Eur. Phys. J. D 8 (2000) 245-250
21. Dankert O., and Pundt A. Hydrogen-induced percolation in discontinuous films. Appl. Phys. Lett. 81 (2002) 1618-1620