Sensitive, selective, and analytical improvements to a porous silicon gas sensor

Sensors and Actuators, B: Chemical

Volumn 110, Issue 1, 2005, Pages 54-65

  Lewis, Stephen E ^a   Deboer, John R ^b   Gole, James L ^a,b   Hesketh, Peter J ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Conductometric porous silicon gas sensors; Diffusion based model; Integrated CMOS devices

Indexed keywords

CARBON MONOXIDE; DIFFUSION; LAYERED MANUFACTURING; POROUS MATERIALS; SENSITIVITY ANALYSIS; SENSORS;

CONDUCTOMETRIC POROUS SILICON GAS SENSORS; DIFFUSION-BASED MODEL; INTEGRATED CMOS DEVICES; TRANSDUCTION SITES;

CHEMICAL SENSORS;

EID: 23144459386     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.01.014     Document Type: Article

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