A direct current glow discharge plasma source for inner surface modification of metallic tube

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 263, Issue 2, 2007, Pages 535-537

  Wen, Xiao Qiong ^a   Yin, Li Yong ^a   Wang, De Zhen ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Diamond like carbon film; Direct current glow discharge; Inner surface modification; Metallic tube

Indexed keywords

ELECTRIC EXCITATION; ELECTRIC POTENTIAL; ELECTRODES; OPTICAL EMISSION SPECTROSCOPY; SURFACE TREATMENT; THIN FILMS;

DIAMOND-LIKE CARBON FILMS; DIRECT CURRENT GLOW DISCHARGE; INNER SURFACE MODIFICATION; METALLIC TUBES;

PLASMA SOURCES;

EID: 34848846582     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.07.020     Document Type: Article

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