Paper: Conveyor for Pneumatic Two-Dimensional Manipulation Realized by Arrayed MEMS and its Control

Journal of Robotics and Mechatronics

Volumn 16, Issue 2, 2004, Pages 163-170

  Fukuta, Yamato ^a   Yanada, Masashi ^b   Ino, Atsushi ^b   Mita, Yoshio ^c   Chapuis, Yves André ^a   Konishi, Satoshi ^b   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

autonomous distributed system (ADS); conveyance system; micro manipulation; microelectromechanical systems (MEMS); pneumatic

Indexed keywords

AIR; ELECTROMECHANICAL DEVICES; MICROMECHANICS; NOZZLES; PNEUMATICS; WEIGHING;

AIR FLOW; AIR NOZZLES; AUTONOMOUS DISTRIBUTED SYSTEM; CONVEYANCE SYSTEMS; EQUILIBRIUM POINT; MICRO MANIPULATION; MICROELECTROMECHANICAL SYSTEM; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; TWO-DIMENSIONAL;

MEMS;

EID: 20444371119     PISSN: 09153942     EISSN: 18838049     Source Type: Journal    
DOI: 10.20965/jrm.2004.p0163     Document Type: Article

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