Microwave FBAR structures fabricated using micromachined GaN membranes

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 877-880

  Neculoiu, Dan ^a   Konstantinidis, Geroge ^b   Müller, Alexandru ^a   Kostopoulos, Athanasios ^b   Vasilache, Dan ^a   Mutamba, Kabula ^c   Sydlo, Cesary ^d   Hartnagel, Hans L ^d   Bary, Laurent ^e   Plana, Robert ^e  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^c INFINEON TECHNOLOGIES AG   (Germany)

^d DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^e LAAS CNRS   (France)

Author keywords

Bulk acoustic wave devices; Compound semiconductor membrane; Coplanar waveguide; MEMS devices; Micromachining; Piezoelectric resonator

Indexed keywords

COPLANAR WAVEGUIDES; GALLIUM NITRIDE; MEMS; MICROMACHINING; MICROWAVE DEVICES; THIN FILM DEVICES;

COMPOUND SEMICONDUCTOR MEMBRANES; MEMS DEVICES; PIEZOELECTRIC RESONATORS; S-PARAMETER MEASUREMENTS;

ACOUSTIC BULK WAVE DEVICES;

EID: 34748841488     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380119     Document Type: Conference Paper

References (8)

1. IEEE Trans. Microwave Theory and Tech., "Special issue on microwave acoustic wave devices for wireless communications and sensing", vol.49, No.4, April 2001
2. K. K. Lakin, "Thin film resonator technology", IEEE Trans. Ultrason., Ferroelectricts and Freq. Control, vol. 52, no. 5, pp. 707-716, May 2005.
3. Q.-X. Su, P. Kirby, E. Komuro, M. Imura, Q. Zhang, and R. Whatmore, "Thin film bulk acoustic resonator using ZnO and Lead-Zirconium-Titanate thin films", IEEE Trans. Microwave Theory and Tech., vol. 49, no. 4, April 2001.
4. E. Kwon Kim, T. Yong Lee, H. Suk Hwang, Y. Sung Kim, Y. Park, J. Tae Song, "Improvement of the crystallinity of ZnO thin films and frequency characteristics of a film bulk acoustic wave resonator by using an Ru buffer layer and annealing treatment" Superlattices and Microstructures, vol. 39, pp. 138-144, 2006.
5. G. R. Kline and K. M. Lakin, "1.0-GHz thin film bulk acoustic wave resonators on GaAs", Appl. Phys. Lett., vol. 43, no. 8, pp. 750-751, 1983.
6. D. Neculoiu, G. Konstantini dis, K. Mutamba, A. Takacs, D. Vasilache, C. Sydlo, T. Kostopoulos, A. Stavrinidis, A. Muller, "Electromagnetic modeling of micromachined GaN thin films for FBAR applications", Proceedings of CAS 2005, pp.119-122, Sinaia, Romania, October 2005.
7. IEEE Standard on Piezoelectricity, ANSI/IEEE Std.176-1987, IEEE, NY, 1988
8. http://www.ioffe.ru/SVA/NSM/Semicond/GaN/