A single photon avalanche diode implemented in 130-nm CMOS technology

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 13, Issue 4, 2007, Pages 863-869

  Niclass, Cristiano ^b   Gersbach, Marek ^b   Henderson, Robert ^a,c   Grant, Lindsay ^d   Charbon, Edoardo ^a,b  

^a IEEE

^b EPFL   (Switzerland)

^c UNIVERSITY OF EDINBURGH   (United Kingdom)

^d STMicroelectronics Ltd Bristol   (United Kingdom)

Author keywords

CMOS single photon detector; Geiger mode of operation; Single photon avalanche diode; SPAD

Indexed keywords

CMOS INTEGRATED CIRCUITS; MEDICAL IMAGING; PHOTONS; QUENCHING;

CMOS SINGLE PHOTON DETECTOR; FAST COMPARATOR; FULL-WIDTH AT HALF-MAXIMUM (FWHM); GEIGER MODE OF OPERATION; SINGLE PHOTON AVALANCHE DIODE;

AVALANCHE DIODES;

EID: 34648839898     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.903854     Document Type: Article

References (40)

1. T. G. Etoh et al, "An image sensor which captures 100 consecutive frames at 1,000,000 frames/s," IEEE Trans. Electron Devices, vol. 50, no. 1, pp. 144-151, Jan. 2003.
2. Photron LTD, www.photron.com
3. J. S. Haight et al., "Application of an ultra-high-speed framing camera to aero-optic investigations," in Proc. SPIE, vol. 1968, 1993, pp. 841-848.
4. S. V. Tipinis et al, "High-speed x-ray imaging camera for time-resolved diffraction studies," IEEE Trans. Nucl. Sci., vol. 49, no. 5, pp. 2415-2419, Oct. 2002.
5. S. Eisenberg et al., "Visualization and PIV measurements of high-speed flows and other phenomena with novel ultra-high-speed CCD camera," in Proc. SPIE, 2002, vol. 4948, pp. 671-676.
6. W. Reckers et al, "Investigation of flame propagation, and cyclic combustion variations in a DISI engine using synchronous high-speed visualization and cylinder pressure analysis," in Proc. int. Symposium Verbrennungdiagnostik, 2002, pp. 27-32.
7. J. Fisher et al., "In Vivo fluorescence microscopy of neuronal activity in three dimensions by use of voltage-sensitive dyes," Opt. Lett., vol. 29, no. 1, pp. 71-73, Jan. 2004.
8. Grinvald et al., "In-Vivo optical imaging of cortical architecture and dynamics," in Modern Techniques in Neuroscience Research, U. Windhorst and H. Johansson, Eds. New York: Springer, 2001.
9. S. M. Potter et al., "High-speed CCD movie camera with random pixel selection for neurobiology research," in Proc. SPIE, 1997, vol. 2869, pp. 243-253.
10. W. Becker, A. Bergmann, E. Haustein, Z. Petrasek, P. Schwille, C. Biskup, L. Kelbauskas, K. Benndorf, N. Klöcker, T. Anhut, I. Riemann, and K. König, "Fluorescence lifetime images and correlation, spectra obtained by multidimensional time-correlated single photon counting," Microsc. Res. Techn., vol. 69, pp. 186-195, 2006.
11. V. Agronskaia, L. Tertoolen, and H. C. Gerritsen, "Fast fluorescence life-time imaging of calcium in living cells," J. Biomed. Opt., vol. 9, no. 6, pp. 1230-1237, Nov./Dec. 2004.
12. J. Qu, L. Liu, B. Guo, Z. Lin, T. Hu, J. Tian, S. Wang, J. Zhang, and H. Niu, "Development of a multispectral multiphoton fluorescence life-time imaging microscopy system using a streak camera," in Proc. SPIE, 2005, vol. 5630, pp. 510-516.
13. P. Schwille, U. Haupts, S. Maiti, and W. W. Webb, "Molecular dynamics in living cells observed by fluorescence correlation spectroscopy with oneand two-photon excitation," Biophys. J., vol. 77, pp. 2251-2265, 1999.
14. W. Becker, K. Benndorf, A. Bergmann, C. Biskup, K. König, U. Tirplapur, and T. Zimmer, "FRET measurements by TCSPC laser scanning microscopy," in Proc. SPIE, 2001, vol. 4431, ECBO.
15. R. Miyagawa and T. Kanade, "CCD range-finding sensor," IEEE Trans. Electron. Devices, vol. 44, no. 10, pp. 1648-1652, Oct. 1997.
16. R. Lange, "3-D time-of-flight distance measurement with custom solid state image sensors in CMOS/CCD-technology" Ph.D. Thesis, ETH-Zürich, Sep. 2000.
17. O. Elkhalili, O. M. Schrey, P. Mengel, M. Petermann, W. Brockherde, and B. J. Hosticka, "A 4 × 64 pixel CMOS image sensor for 3-D measurement applications," IEEE J. Solid State Circuits, vol. 39, no. 7, pp. 1208-1212, Jul. 2004.
18. J. McPhate et al, "Noiseless kilohertz-frame-rate imaging detector based on microchannel plates readout with medipix2 CMOS pixel chip," Proc. SPIE, vol. 5881, pp. 88-97, 2004.
19. S. Cova, A. Longoni, A. Andreoni, and R. Cubeddu, "A semiconductor detector for measuring ultraweak fluorescence decays with 70 ps FWHM resolution," IEEE J. Quantum Electron., vol. 10, no. 4, pp. 63-634, Apr. 1983.
20. Rochas, M. Gani, B. Furrer, P. A. Besse, R. S. Popovic, G. Ribordy, and N. Gisin, "Single photon detector fabricated in. a complementary metal-oxide-semiconductor high-voltage technology," Rev. Sci. Instruments, vol. 74, no. 7, pp. 3263-3270, Jul. 2003.
21. D. Mosconi, D. Stoppa, M. Malfatti, M. Perenzoni, M. Scandiuzzo, and L. Gonzo, "A CMOS sensor based on single photon, avalanche diode for fluorescence lifetime measurements," Instrument. Measur. Technol. Conf. (IMTC), pp. 416-419, Apr. 2006.
22. F. Zappa, S. Tisa, A. Gulinatti, A. Gallivanoni, and S. Cova, "Monolithic CMOS detector module for photon counting and picosecond timing," IEEE ESSDERC, pp. 341-344, Sep. 2004.
23. Niclass A. Rochas, P. A. Besse, and E. Charbon, "Design, and characterization of a CMOS 3-D image sensor based on single photon avalanche diodes," IEEE J. Solid State Circuits, vol. 40, no. 9, pp. 1847-1854, Sep. 2005.
24. B. F. Aull et al., "Geiger-mode avalanche photodiodes for three dimensional imaging," Lincoln Lab. J., vol. 12, no. 2, pp. 335-350, 2002.
25. G. Stewart et al., "Study of the properties of new SPM detectors," SPIE: Semicond. Photodetectors III, vol. 6119, 2006.
26. Niclass, A. Rochas, P. A. Besse, and E. Charbon, "A CMOS single photon avalanche diode array for 3-D imaging," IEEE Int. Solid State Circuit Conf. (ISSCC), pp. 120-121, Feb. 2004.
27. Niclass and E. Charbon, "A single photon detector array with 64 × 64 resolution and millimetric depth accuracy for 3-D imaging," IEEE Int. Solid State Circuit Conf. (ISSCC), pp. 364-365, Feb. 2005.
28. M. Gösch et al., "Parallel single molecule detection with fully integrated single photon. 2 × 2 CMOS detector array," J. Biomed. Opt., vol. 9, no. 5, 2004.
29. Niclass, A. Rochas, P.A. Besse, R. Popovic, and E. Charbon, "A 4 μs integration time imager based on CMOS single photon avalanche diode technology," Sensors Actuators: A Phys., vol. A130-1, pp. 273-281, Aug. 2006.
30. M. Gersbach et al., "Time-correlated fluorescence microscopy using a room, temperature solid state single photon sensor," Int. Conf. Near-Field Optics, Nanophotonics and Related Techniques (NFO), Sep. 2006.
31. Stellari et al., "Testing and diagnostics of CMOS circuits using light emission from off-state leakage current," IEEE Trans. Electron. Devices, vol. 5.1, no. 9, pp. 1455-1462, 2004.
32. Niclass, M. Sergio, and E. Charbon, "A CMOS 64 × 48 single photon avalanche diode array with event-driven readout," IEEE ESSCIRC, Oct. 2006.
33. M. Sergio, C. Niclass, and E. Charbon, "A 128 × 2 CMOS single photon streak camera with timing-preserving latchless pipeline readout," IEEE Int. Solid State Circuits Conf. (ISSCC), Feb. 2007.
34. S. Cova, M. Ghioni, F. Zappa, I. Rech, and A. Gulinatti, "A view on progress of silicon single photon avalanche diodes," Adv. Photon Counting Tech. Proc. SPIE, vol. 6372, p. 637201-1, Oct. 2006.
35. H. Finkelstein, M. J. Hsu, and S. C. Esener, "STI-bounded single-photon avalanche diode in a deep-submicrometer CMOS technology," IEEE Electron. Device Lett., vol. 27, no. 11, pp. 887-889, Nov. 2006.
36. T. Mamamoto, "Sidewall damage in a silicon, substrate caused by trench, etching," Appl. Phys. Lett., vol. 58, no. 25, pp. 2942-2944, Jun. 1991.
37. H. I. Kwon, M. I. Kang, B.-G. Park, J. D. Lee, and S. S. Park, "The analysis of dark signals in the CMOS APS imagers from, the characterization of test structures," IEEE Trans. Electron. Devices, vol. 5.1, no. 2, pp. 178-184, Feb. 2004.
38. IdQuantique, www.idquan.tique.ch
39. Lacaita, F. Zappa, S. Cova, and P. Lovati, "Single-photon detection beyond 1 μm: performance of commercially available InGaAs@I.nP detectors," Appl. Opt., vol. 35, no. 16, Jun. 1996.
40. Rochas, "Single photon avalanche diodes in CMOS technology," Ph.D. Thesis, EPF-Lausanne, 2003.