Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides

Optics Express

Volumn 15, Issue 19, 2007, Pages 11798-11807

  Hu, Juejun ^a   Tarasov, Vladimir ^a   Carlie, Nathan ^b   Feng, Ning Ning ^a   Petit, Laeticia ^b   Agarwal, Anu ^a   Richardson, Kathleen ^b   Kimerling, Lionel ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHALCOGENIDES; MODAL ANALYSIS; OPTICAL LOSSES; OPTICAL WAVEGUIDES; SEMICONDUCTING SILICON; SURFACE ROUGHNESS;

CHALCOGENIDE WAVEGUIDES; GLASS FILMS; STRIP WAVEGUIDES; TRANSMISSION LOSSES;

CMOS INTEGRATED CIRCUITS;

EID: 34648834959     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.011798     Document Type: Article

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