A simple method for measuring plasma power in rf-GDOES instruments

Analytical and Bioanalytical Chemistry

Volumn 389, Issue 3, 2007, Pages 763-767

  Nelis, T ^a   Aeberhard, M ^a   Rohr, L ^a   Michler, J ^a   Belenguer, P ^b   Guillot, P ^c   Therese L ^c  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b Laboratoire Plasma et Conversion d'Energie   (France)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Blind power; rf GDOES; rf Power control

Indexed keywords

ELECTRIC COILS; ELECTRIC POTENTIAL; ELECTRIC POWER SYSTEMS; POWER CONTROL;

BLIND POWER; INDUCTIVE COILS; STRAY CAPACITY;

PLASMAS;

EID: 34648832236     PISSN: 16182642     EISSN: 16182650     Source Type: Journal    
DOI: 10.1007/s00216-007-1509-3     Document Type: Article

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