Theory of relative sputtering rates in GDOES

Surface and Interface Analysis

Volumn 35, Issue 4, 2003, Pages 334-339

  Payling, Richard ^a,b   Aeberhard, Max ^a   Michler, Johann ^a   Authier, Cyril ^c   Chapon, Patrick ^c   Nelis, Thomas ^d   Pitchford, Leanne ^e  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b UNIVERSITY OF NEWCASTLE   (Australia)

^c ISA Jobin Yvon   (France)

^d Le Village ^*  (France)

^e CNRS   (France)

Author keywords

GDOES; Sputtering rate

Indexed keywords

CAST IRON; PLASMAS; SPUTTERING; SURFACE PHENOMENA; ZINC ALLOYS;

GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GDOES);

GLOW DISCHARGES;

EID: 0037389080     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1536     Document Type: Article

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