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Volumn 46, Issue 33-35, 2007, Pages
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Study of the n+ GaN cap in AlGaN/GaN high electron mobility transistors with reduced source-drain resistance
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Author keywords
Access resistance; AlGaN GaN; Contact resistance; High electron mobility transistor (HEMT); n+ GaN cap; Non alloyed
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Indexed keywords
CONTACT RESISTANCE;
DOPING (ADDITIVES);
ELECTRON GAS;
HIGH ELECTRON MOBILITY TRANSISTORS;
OHMIC CONTACTS;
SHEET RESISTANCE;
ACCESS RESISTANCE;
DELTA DOPINGS;
HETEROINTERFACE;
GALLIUM NITRIDE;
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EID: 34648818274
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.46.L842 Document Type: Article |
Times cited : (11)
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References (12)
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