Crystallization of silicon nitride thin films synthesized by plasma-enhanced chemical vapour deposition

Scripta Materialia

Volumn 57, Issue 8, 2007, Pages 739-742

  Jehanathan, Neerushana ^a   Saunders, Martin ^a   Liu, Yinong ^a   Dell, John ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Chemical vapour deposition; Energy filtering transmission electron microscopy; Scanning electron microscopy; Silicone nitride; Thin films

Indexed keywords

CRYSTALLIZATION KINETICS; HIGH TEMPERATURE OPERATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS THIN FILMS; ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPY; LARGE VOLUME CONTRACTION;

THIN FILMS;

EID: 34548676209     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.06.035     Document Type: Article

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