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Volumn 47, Issue 14, 2007, Pages 2077-2090

A study on the fabrication of curved surfaces using magnetorheological fluid finishing

Author keywords

Curved surface; Micromachining; Radius of curvature; Response surface methodology (RSM)

Indexed keywords

FABRICATION; FINISHING; FINITE ELEMENT METHOD; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; REGRESSION ANALYSIS; RHEOLOGY; SILICON;

EID: 34548317439     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2007.05.007     Document Type: Article
Times cited : (87)

References (30)
  • 1
    • 0035944478 scopus 로고    scopus 로고
    • Local material removal mechanism considering curvature effect in the polishing process of the small aspherical lens die
    • Yang M.Y., and Lee H.C. Local material removal mechanism considering curvature effect in the polishing process of the small aspherical lens die. Journal of Material Processing Technology 116 (2001) 298-304
    • (2001) Journal of Material Processing Technology , vol.116 , pp. 298-304
    • Yang, M.Y.1    Lee, H.C.2
  • 3
    • 4544373838 scopus 로고    scopus 로고
    • Chemical mechanical planarization for microelectronics applications
    • Zantye P.B., Kumar A., and Sikder A.K. Chemical mechanical planarization for microelectronics applications. Material Science and Technology R 45 (2004) 89-220
    • (2004) Material Science and Technology R , vol.45 , pp. 89-220
    • Zantye, P.B.1    Kumar, A.2    Sikder, A.K.3
  • 4
    • 2442507883 scopus 로고    scopus 로고
    • Design and development of the magnetorheological abrasive flow finishing (MRAFF) process
    • Jha S., and Jain V.K. Design and development of the magnetorheological abrasive flow finishing (MRAFF) process. International Journal of Machine Tools & Manufacture 44 (2004) 1019-1029
    • (2004) International Journal of Machine Tools & Manufacture , vol.44 , pp. 1019-1029
    • Jha, S.1    Jain, V.K.2
  • 5
    • 34548350336 scopus 로고    scopus 로고
    • S.D. Jacobs, W. Kordonski, I.V. Prokhorov, D. Golini, G.R. Gorodkin, T.D. Strafford, Magnetorheological fluid composition, US Patent No. 5,804,095, 1998.
  • 6
    • 0036473607 scopus 로고    scopus 로고
    • Rheological properties of magnetorheological fluids
    • Genc S., and Phule P.P. Rheological properties of magnetorheological fluids. Smart Materials Structures 11 (2002) 140-146
    • (2002) Smart Materials Structures , vol.11 , pp. 140-146
    • Genc, S.1    Phule, P.P.2
  • 7
    • 0002259968 scopus 로고    scopus 로고
    • Experiments and observation regarding the mechanism of glass removal in magnetorheological finishing
    • Shorey A.B., Jacobs S.D., Kordonski W.I., and Gans R.F. Experiments and observation regarding the mechanism of glass removal in magnetorheological finishing. Applied Optics 40 (2001) 20-33
    • (2001) Applied Optics , vol.40 , pp. 20-33
    • Shorey, A.B.1    Jacobs, S.D.2    Kordonski, W.I.3    Gans, R.F.4
  • 8
    • 34548360331 scopus 로고    scopus 로고
    • W. Kordonski, S.D. Jacobs, Magnetorheological finishing, in: Proceedings of the Fifth International Conference on ER Fluids, MR Suspensions, 1985, pp. 1-12.
  • 10
    • 14844287006 scopus 로고    scopus 로고
    • Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid
    • Kim W.B., Lee S.H., and Min B.K. Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid. Journal of Manufacturing Science and Engineering 126 (2004) 772-778
    • (2004) Journal of Manufacturing Science and Engineering , vol.126 , pp. 772-778
    • Kim, W.B.1    Lee, S.H.2    Min, B.K.3
  • 13
    • 0032651252 scopus 로고    scopus 로고
    • Application of response surface methodology for predicting weld bead quality in submerged arc welding of pipes
    • Gunaraj V., and Murugan N. Application of response surface methodology for predicting weld bead quality in submerged arc welding of pipes. Journal of Materials Processing Technology 88 (1999) 266-275
    • (1999) Journal of Materials Processing Technology , vol.88 , pp. 266-275
    • Gunaraj, V.1    Murugan, N.2
  • 14
    • 29144481959 scopus 로고    scopus 로고
    • Response surface methodology-based approach to CNC drilling operations
    • Onwubolu G.C., and Kumar S. Response surface methodology-based approach to CNC drilling operations. Journal of Materials Processing Technology 171 (2006) 41-47
    • (2006) Journal of Materials Processing Technology , vol.171 , pp. 41-47
    • Onwubolu, G.C.1    Kumar, S.2
  • 15
    • 27344460096 scopus 로고    scopus 로고
    • Application of response surface methodology in the optimization of cutting conditions for surface roughness
    • Öktem H., Erzurumlu T., and Kurtaran H. Application of response surface methodology in the optimization of cutting conditions for surface roughness. Journal of Materials Processing Technology 170 (2005) 11-16
    • (2005) Journal of Materials Processing Technology , vol.170 , pp. 11-16
    • Öktem, H.1    Erzurumlu, T.2    Kurtaran, H.3
  • 16
    • 0031369027 scopus 로고    scopus 로고
    • T. Simon, F. Reitich, Modeling and computation of the overall magnetic properties of magnetorheological fluids, in: Proceedings of the 36th Conference on Decision & Control, San Diego, CA, 1997, pp. 3721-3726.
  • 17
    • 13344270633 scopus 로고
    • Contact and rubbing of flat surfaces
    • Archad J.F. Contact and rubbing of flat surfaces. Journal of Applied Physics 24 (1953) 981-988
    • (1953) Journal of Applied Physics , vol.24 , pp. 981-988
    • Archad, J.F.1
  • 18
    • 20344380175 scopus 로고    scopus 로고
    • Y. Ku, Y. Jeon, J. Kim, D. Lee, improvement of feasibility of design space using response surface and Kriging method, in: 10th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, New York, 2004, pp. 30-1.
  • 20
    • 34548315571 scopus 로고    scopus 로고
    • Ansoft Corporation, Maxwell 2D Program 〈www.ansoft.com〉.
  • 21
    • 34548301013 scopus 로고    scopus 로고
    • Lord Corporation, Magneto-Rheologcial (MR) Technology 〈www.lord.com〉.
  • 23
    • 34548301014 scopus 로고    scopus 로고
    • SAS Library: Nonlinear Regression in SAS 〈http://www.ats.ucla.edu/stat/sas/library/SASNLinos.htm〉.
  • 25
    • 0032320325 scopus 로고    scopus 로고
    • Modification of the Preston equation for the chemical-mechanical polishing of copper
    • Luo Q., Ramarajan S., and Babu S.V. Modification of the Preston equation for the chemical-mechanical polishing of copper. Thin Solid Film 335 (1998) 160-167
    • (1998) Thin Solid Film , vol.335 , pp. 160-167
    • Luo, Q.1    Ramarajan, S.2    Babu, S.V.3
  • 28
    • 0037309253 scopus 로고    scopus 로고
    • Multi-scale material removal modeling of chemical mechanical polishing
    • Seok J.W., Sukam C.P., Kim A.T., Tichy J.A., and Cale T.S. Multi-scale material removal modeling of chemical mechanical polishing. Wear 254 (2003) 307-320
    • (2003) Wear , vol.254 , pp. 307-320
    • Seok, J.W.1    Sukam, C.P.2    Kim, A.T.3    Tichy, J.A.4    Cale, T.S.5
  • 30
    • 0002259968 scopus 로고    scopus 로고
    • Experiments and observations regarding the mechanisms of glass removal in magnetorheological finishing
    • Shorey A.B., Jacobs S.D., Kordonski W.I., and Gans R.F. Experiments and observations regarding the mechanisms of glass removal in magnetorheological finishing. Applied Optics 40 (2001) 20-33
    • (2001) Applied Optics , vol.40 , pp. 20-33
    • Shorey, A.B.1    Jacobs, S.D.2    Kordonski, W.I.3    Gans, R.F.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.