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Volumn 125, Issue 2, 2003, Pages 448-450

Soft elastohydrodynamic lubrication with roughness

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELASTICITY; STRESS ANALYSIS; SURFACE ROUGHNESS; TRIBOLOGY;

EID: 0037390151     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1494100     Document Type: Article
Times cited : (14)

References (9)
  • 1
    • 0034480717 scopus 로고    scopus 로고
    • Interfacial fluid mechanics and pressure prediction in chemical mechanical polishing
    • Shan, L., Levert, J., Meade, L., Danyluk, S., and Tichy, J. A., 2000, "Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing," ASME J. Tribol., 122(3), pp. 539-543.
    • (2000) ASME J. Tribol. , vol.122 , Issue.3 , pp. 539-543
    • Shan, L.1    Levert, J.2    Meade, L.3    Danyluk, S.4    Tichy, J.A.5
  • 2
    • 0032661328 scopus 로고    scopus 로고
    • Contact mechanics and lubrication hydrodynamics of chemical mechanical polishing
    • Tichy, J. A., Levert, J., Shan, L., and Danyluk, S., 1999, "Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing," J. Electrochem. Soc., 146, pp. 1523-1528.
    • (1999) J. Electrochem. Soc. , vol.146 , pp. 1523-1528
    • Tichy, J.A.1    Levert, J.2    Shan, L.3    Danyluk, S.4
  • 3
    • 0033318166 scopus 로고    scopus 로고
    • Effects of film stress on the chemical mechanical polishing process
    • Tseng, W., Wang, Y., and Chin, J., 1999, "Effects of Film Stress on the Chemical Mechanical Polishing Process," J. Electrochem. Soc., 146, pp. 4273-4280.
    • (1999) J. Electrochem. Soc. , vol.146 , pp. 4273-4280
    • Tseng, W.1    Wang, Y.2    Chin, J.3
  • 4
    • 0031277984 scopus 로고    scopus 로고
    • Wear phenomena in chemical mechanical polishing
    • Liang, H., Kaufman, F., Sevilla, R., and Anjur, S., 1997, "Wear Phenomena in Chemical Mechanical Polishing," Wear, 211, pp. 271-279.
    • (1997) Wear , vol.211 , pp. 271-279
    • Liang, H.1    Kaufman, F.2    Sevilla, R.3    Anjur, S.4
  • 6
    • 0034915409 scopus 로고    scopus 로고
    • An average flow model of rough surface lubrication with inter-asperity cavitation
    • Harp, S. R., and Salant, R. F., 2001, "An Average Flow Model of Rough Surface Lubrication with Inter-Asperity Cavitation," ASME J. Tribol., 123(1), pp. 134-142.
    • (2001) ASME J. Tribol. , vol.123 , Issue.1 , pp. 134-142
    • Harp, S.R.1    Salant, R.F.2
  • 7
    • 0000827365 scopus 로고
    • Contact of nominally flat rough surfaces
    • Ser. A
    • Greenwood, J. A., and Williamson, J. B. P., 1966, "Contact of Nominally Flat Rough Surfaces," Proc. R. Soc. London, Ser. A, 295, pp. 300-319.
    • (1966) Proc. R. Soc. London , vol.295 , pp. 300-319
    • Greenwood, J.A.1    Williamson, J.B.P.2
  • 8
    • 85040875608 scopus 로고
    • Cambridge University Press, Cambridge, UK
    • Johnson, K. L., 1985, Contact Mechanics, Cambridge University Press, Cambridge, UK.
    • (1985) Contact Mechanics
    • Johnson, K.L.1
  • 9
    • 0028444787 scopus 로고
    • Tribology analysis of chemical-mechanical polishing
    • Runnels, S. R., and Eyman, L. M., 1994, "Tribology Analysis of Chemical-Mechanical Polishing," J. Electrochem. Soc., 141, pp. 1698-1701.
    • (1994) J. Electrochem. Soc. , vol.141 , pp. 1698-1701
    • Runnels, S.R.1    Eyman, L.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.