Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid

Journal of Manufacturing Science and Engineering

Volumn 126, Issue 4, 2004, Pages 772-778

  Kim, Wook Bae ^a   Lee, Seung Hwan ^a   Min, Byung Kwon ^a  

^a Yonsei University   (South Korea)

Author keywords

Magnetorheological Fluid; Microchannel; Surface Finishing

Indexed keywords

ABRASIVES; FINISHING; MICROSTRUCTURE; OPTICAL DEVICES; POLISHING; RHEOLOGY; SURFACE ROUGHNESS; THREE DIMENSIONAL;

MAGNETORHEOLOGICAL FINISHING (MRF); MAGNETORHEOLOGICAL FLUIDS; MICROCHANNELS; SURFACE FINISHING;

SILICON;

EID: 14844287006     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1811113     Document Type: Article

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