-
1
-
-
0001653076
-
-
S.M. Johnson, D.R. Righer, J.P. Rosbeck, J.M. Peterson, S.M. Taylor, and M.E. Boyd, J. Vac. Sci. Technol. B 10 (4), 1499 (1992)
-
(1992)
J. Vac. Sci. Technol. B
, vol.10
, Issue.4
, pp. 1499
-
-
Johnson, S.M.1
Righer, D.R.2
Rosbeck, J.P.3
Peterson, J.M.4
Taylor, S.M.5
Boyd, M.E.6
-
3
-
-
0043269258
-
-
H. Figgemeir, M. Bruder, K. Mahlein, R. Wollarb, and J. Ziegler, J. Electron. Mater. 32 (7), 588 (2003)
-
(2003)
J. Electron. Mater.
, vol.32
, Issue.7
, pp. 588
-
-
Figgemeir, H.1
Bruder, M.2
Mahlein, K.3
Wollarb, R.4
Ziegler, J.5
-
5
-
-
0032656244
-
-
P. Wijewarnasuriya, M. Zandian, D. Young, J. Waldrop, D. Edwall, W. McLevige, D. Lee, J. Arias, and A. D'Souza, J. Electron. Mater. 28 (6), 649 (1999)
-
(1999)
J. Electron. Mater.
, vol.28
, Issue.6
, pp. 649
-
-
Wijewarnasuriya, P.1
Zandian, M.2
Young, D.3
Waldrop, J.4
Edwall, D.5
McLevige, W.6
Lee, D.7
Arias, J.8
D'Souza, A.9
-
6
-
-
0029304907
-
-
A. Paxton, A. Sher, M. Berding, M. Van Schilfgaarde, and M.W. Muller, J. Electron. Mater. 24 (5), 525 (1995)
-
(1995)
J. Electron. Mater.
, vol.24
, Issue.5
, pp. 525
-
-
Paxton, A.1
Sher, A.2
Berding, M.3
Van Schilfgaarde, M.4
Muller, M.W.5
-
8
-
-
21544434863
-
-
E.A. Fitzgerald, G.P. Watson, R.E. Proano, D.G. Ast, P.D. Kirchner, G.D. Pettit, and J.M. Woodall, J. Appl. Phys. 65 (6), 2220 (1989)
-
(1989)
J. Appl. Phys.
, vol.65
, Issue.6
, pp. 2220
-
-
Fitzgerald, E.A.1
Watson, G.P.2
Proano, R.E.3
Ast, D.G.4
Kirchner, P.D.5
Pettit, G.D.6
Woodall, J.M.7
-
9
-
-
0042768021
-
-
M. Carmody, D. Lee, M. Zandian, J. Phillips, and J. Arias, J. Electron. Mater.32 (7), 710 (2003)
-
(2003)
J. Electron. Mater.
, vol.32
, Issue.7
, pp. 710
-
-
Carmody, M.1
Lee, D.2
Zandian, M.3
Phillips, J.4
Arias, J.5
-
10
-
-
0033690155
-
-
M. Berding, W. Nix, D. Rhiger, S. Sen, and A. Sher, J. Electron. Mater. 29 (6), 676 (2000)
-
(2000)
J. Electron. Mater.
, vol.29
, Issue.6
, pp. 676
-
-
Berding, M.1
Nix, W.2
Rhiger, D.3
Sen, S.4
Sher, A.5
-
11
-
-
0029379383
-
-
S. Tobin, F. Smith, P. Norton, J. Wu, M. Dudley, D. DiMarzio, and L. Casagrande, J. Electron. Mater. 24, 1189 (1995)
-
(1995)
J. Electron. Mater.
, vol.24
, pp. 1189
-
-
Tobin, S.1
Smith, F.2
Norton, P.3
Wu, J.4
Dudley, M.5
Dimarzio, D.6
Casagrande, L.7
-
13
-
-
0042484090
-
-
D. Rhiger, J. Peterson, R. Emerson, E. Gordon, S. Sen, Y. Chen, and M. Dudley, J. Electron. Mater. 27 (6), 615 (1998)
-
(1998)
J. Electron. Mater.
, vol.27
, Issue.6
, pp. 615
-
-
Rhiger, D.1
Peterson, J.2
Emerson, R.3
Gordon, E.4
Sen, S.5
Chen, Y.6
Dudley, M.7
-
16
-
-
84955013157
-
-
H. Schaake, J. Tregilgas, J. Beck, M. Kinch, and B. Gnade, J. Vac. Sci. Technol. A3, 143 (1985)
-
(1985)
J. Vac. Sci. Technol.
, vol.3
, pp. 143
-
-
Schaake, H.1
Tregilgas, J.2
Beck, J.3
Kinch, M.4
Gnade, B.5
-
17
-
-
0042266737
-
-
D. Chandra, H. Schaake, and M. Kinch, J. Electron. Mater. 32 (7), 810 (2003)
-
(2003)
J. Electron. Mater.
, vol.32
, Issue.7
, pp. 810
-
-
Chandra, D.1
Schaake, H.2
Kinch, M.3
-
18
-
-
34548250933
-
-
S. Hu (2006 internal results from summer internship)
-
S. Hu (2006 internal results from summer internship)
-
-
-
-
19
-
-
34548219986
-
-
B. Woodward (2005 internal results from summer internship)
-
B. Woodward (2005 internal results from summer internship)
-
-
-
-
20
-
-
34548217708
-
-
J. Riendeau (2004 internal results from summer internship)
-
J. Riendeau (2004 internal results from summer internship)
-
-
-
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