-
1
-
-
0041482129
-
-
S.L. Price, H.L. Hettich, S. Sen, M.C. Currie, D.R. Rhiger and E.O. McLean, J. Electron. Mater. 27, 564 (1998).
-
(1998)
J. Electron. Mater.
, vol.27
, pp. 564
-
-
Price, S.L.1
Hettich, H.L.2
Sen, S.3
Currie, M.C.4
Rhiger, D.R.5
McLean, E.O.6
-
3
-
-
0029379383
-
-
S.P. Tobin, F.T.J. Smith, P.W. Norton, J. Wu, M. Dudley, D. DiMarzio and L.G. Casagrande, J. Electron. Mater. 24, 1189 (1995).
-
(1995)
J. Electron. Mater.
, vol.24
, pp. 1189
-
-
Tobin, S.P.1
Smith, F.T.J.2
Norton, P.W.3
Wu, J.4
Dudley, M.5
Dimarzio, D.6
Casagrande, L.G.7
-
4
-
-
0000270030
-
-
D.R. Rhiger, S. Sen, J.M. Peterson, H. Chung and M. Dudley, J. Electron. Mater. 26, 515 (1997).
-
(1997)
J. Electron. Mater.
, vol.26
, pp. 515
-
-
Rhiger, D.R.1
Sen, S.2
Peterson, J.M.3
Chung, H.4
Dudley, M.5
-
8
-
-
0001653076
-
-
S.M. Johnson, D.R. Rhiger, J.P. Rosbeck, J.M. Peterson, S.M. Taylor and M.E. Boyd, J. Vac. Sci. Technol. B 10, 1499 (1992).
-
(1992)
J. Vac. Sci. Technol. B
, vol.10
, pp. 1499
-
-
Johnson, S.M.1
Rhiger, D.R.2
Rosbeck, J.P.3
Peterson, J.M.4
Taylor, S.M.5
Boyd, M.E.6
-
11
-
-
0028712736
-
-
SPIE
-
R.S. List, J.H. Tregilgas, A.M, Turner, J.D. Beck and J.C. Ehmke, Proc. SPIE 2228 (SPIE, 1994), p. 274.
-
(1994)
Proc. SPIE
, vol.2228
, pp. 274
-
-
List, R.S.1
Tregilgas, J.H.2
Turner, A.M.3
Beck, J.D.4
Ehmke, J.C.5
-
12
-
-
0029379021
-
-
M. Zandian, J.M. Arias, J. Bajaj, J.G. Pasko, L.O. Bubulac and R.E. DeWames, J. Electron. Mater. 24, 1207 (1995).
-
(1995)
J. Electron. Mater.
, vol.24
, pp. 1207
-
-
Zandian, M.1
Arias, J.M.2
Bajaj, J.3
Pasko, J.G.4
Bubulac, L.O.5
DeWames, R.E.6
-
13
-
-
0001890415
-
-
D.D. Edwall, M. Zandian, A.C. Chen and J.M. Arias, J. Electron. Mater. 26, 493 (1997).
-
(1997)
J. Electron. Mater.
, vol.26
, pp. 493
-
-
Edwall, D.D.1
Zandian, M.2
Chen, A.C.3
Arias, J.M.4
-
15
-
-
0006108760
-
-
D. Chandra, H.-D. Shih, H.F. Schaake, R. Dat, M. Bevan and A.J. Syllaios, J. Electron. Mater. 27, 640 (1998).
-
(1998)
J. Electron. Mater.
, vol.27
, pp. 640
-
-
Chandra, D.1
Shih, H.-D.2
Schaake, H.F.3
Dat, R.4
Bevan, M.5
Syllaios, A.J.6
-
16
-
-
0027167975
-
-
Pittsburgh, PA: Mater. Res. Soc.
-
M. Dudley, Mater. Res. Soc. Symp. Proc. 307 (Pittsburgh, PA: Mater. Res. Soc., 1993), p. 213.
-
(1993)
Mater. Res. Soc. Symp. Proc.
, vol.307
, pp. 213
-
-
Dudley, M.1
-
17
-
-
0028725889
-
-
SPIE
-
D. DiMarzio, D.J. Larson, L.G. Casagrande, J. Wu, M. Dudley, S.P. Tobin and P.W. Norton, SPIE Proc. 2228 (SPIE, 1994), p. 289.
-
(1994)
SPIE Proc.
, vol.2228
, pp. 289
-
-
DiMarzio, D.1
Larson, D.J.2
Casagrande, L.G.3
Wu, J.4
Dudley, M.5
Tobin, S.P.6
Norton, P.W.7
-
18
-
-
3843066533
-
-
Model NT-2000 surface profiler, Wyko Corp., Tucson, Arizona
-
Model NT-2000 surface profiler, Wyko Corp., Tucson, Arizona.
-
-
-
-
20
-
-
0024683122
-
-
A. Nouruzi-Khorasani, I.P. Jones, P.S. Dobson, D.J. Williams, and M.G. Astles, J. Cryst. Growth 96, 348 (1989).
-
(1989)
J. Cryst. Growth
, vol.96
, pp. 348
-
-
Nouruzi-Khorasani, A.1
Jones, I.P.2
Dobson, P.S.3
Williams, D.J.4
Astles, M.G.5
-
23
-
-
3843061074
-
-
R.D. Rajavel, D. Jamba, O.K. Wu, J.A. Roth, P.D. Brewer, J.E. Jensen, C.A. Cockrum, G.M. Venzor and S.M. Johnson, J. Electron. Mater. 25, 1411 (1996).
-
(1996)
J. Electron. Mater.
, vol.25
, pp. 1411
-
-
Rajavel, R.D.1
Jamba, D.2
Wu, O.K.3
Roth, J.A.4
Brewer, P.D.5
Jensen, J.E.6
Cockrum, C.A.7
Venzor, G.M.8
Johnson, S.M.9
-
24
-
-
3843077336
-
-
U.S. Patent No. 5,502,300, 26 March 1996
-
W.O. McKeag and R.D. Granneman, U.S. Patent No. 5,502,300, 26 March 1996.
-
-
-
McKeag, W.O.1
Granneman, R.D.2
|