In situ X-ray diffraction during MOCVD of III-nitrides

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 8, 2007, Pages 2798-2803

  Simbrunner, C ^a   Navarro Quezada, A ^a   Schmidegg, K ^a   Bonanni, A ^a   Kharchenko, A ^b   Bethke, J ^b   Lischka, K ^c   Sitter, H ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^b MALVERN INSTRUMENTS LTD   (United Kingdom)

^c UNIVERSITY OF PADERBORN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL QUALITY; SUPERLATTICE PERIODICITY;

HETEROJUNCTIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SPECTROSCOPIC ELLIPSOMETRY; STRAIN RELAXATION; SUPERLATTICES; X RAY DIFFRACTION;

NITRIDES;

EID: 34548253382     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200675701     Document Type: Article

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