Plasma devices based on the plasma lens - A review of results and applications

IEEE Transactions on Plasma Science

Volumn 35, Issue 4 II, 2007, Pages 986-991

  Goncharov, Alexey A ^a   Brown, Ian G ^b  

^a INSTITUTE OF HYDROBIOLOGY   (Ukraine)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Heavy ion beams; Ion manipulation; Ion treatment and cleaning; Plasma devices; Plasma lens; Plasma optics

Indexed keywords

CLEANING; HEAVY IONS; ION BEAMS; MAGNETIC FIELDS; OPTICAL INSTRUMENT LENSES; POLISHING; SUBSTRATES;

HEAVY ION BEAMS; ION CLEANING; ION MANIPUATION; ION TREATMENT; PLASMA LENS; PLASMA OPTICS;

PLASMA DEVICES;

EID: 34548245016     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.902624     Document Type: Conference Paper

References (24)

1. A. Morozov, "Focusing of cold quasi-neutral beams in electromagnetic fields," Dokl. Akad. Nauk USSR, vol. 163, no. 6, pp. 1363-1366, 1965.
2. A. Morozov and S. Lebedev, "Plasmaoptics," in Reviews of Plasma Physics, M. Leontovich, Ed. New York: Consultants Bureau, 1975, pp. 247-281.
3. A. I. Morozov and N. N. Semashko, "On the mass separation of quasineutral beams," Tech. Phys. Lett., vol. 28, no. 12, pp. 1052-1053, Dec. 2002.
4. I. I. Aksenov, "Magnetic confinement structures in vacuum-arc plasma filtering systems," in Proc. XXI ISDEIV, Yalta, Crimea, 2004, vol. 2, pp. 467-472.
5. I. G. Brown, The Physics and Technology of Ion Sources, 2nd ed. Weinheim: Wiley-VCH, 2004.
6. A. Goncharov, A. Dobrovolsky, A. Zatuagan, and I. Protsenko, "High current plasma lens", IEEE Trans. Plasma Sci. vol. 21 no. 5 pp 573-577 Oct. 1993.
7. A. Goncharov, A. Zatuagan, and I. Protsenko, "Focusing and control of plasma lens multiaperture ion beams," IEEE Trans. Plasma Sci., vol. 21, no. 5, pp. 578-581, Oct. 1993.
8. A. Goncharov, A. Dobrovolsky, I. Protsenko, V. Kaluh, I. Onishchenko, and I. Brown, "Some characteristics of moderate energy metal ion beam focusing by a high current plasma lens" Rev. Sci. Instrum., vol. 69, no. 2, pp. 1135-1137, Feb. 1998.
9. A. Goncharov, I. Protsenko, G. Yushkov, and I. Brown, "Focusing of high-current, large-area, heavy-ion beams with an electrostatic plasma lens," Appl. Phys. Lett., vol. 75, no. 7, pp. 911-913, Aug. 1999.
10. A. Goncharov, I. Protsenko, G. Yushkov, and I. Brown, "Manipulating large area heavy metal ion beams with a high-current electrostatic plasma lens," IEEE Trans. Plasma Sci., vol. 28, no. 6, pp. 2238-2246, Dec. 2000.
11. A. Goncharov, I. Protsenko, G. Yushkov, O. Monteiro, and I. Brown, "High-dose ion implantation using a high-current plasma lens," Surf. Coat. Technol., vol. 128/129, pp. 15-20, Jun. 2000.
12. A. Goncharov, V. Gorshkov, S. Gubarev, A. Dobrovolsky, I. Protsenko, and I. Brown, "Permanent magnet plasma lens," Rev. Sci. Instrum., vol. 73, no. 2, pp. 1001-1003, Feb. 2002.
13. A. Goncharov and I. Brown, "High-current heavy ion beams in the electrostatic plasma lens," IEEE Trans. Plasma Sci., vol. 32, no. 1, pp. 80-83, Feb. 2004.
14. Y. Chekh, A. Goncharov, I. Protsenko, and I. Brown, "Effect of the electrostatic plasma lens on the emittance of a high-current heavy ion beam," Appl. Phys. Lett., vol. 86, no. 4, p. 041502, Jan. 2005.
15. Y. Chekh, A. Dobrovolsky, A. Goncharov, I. Protsenko, and I. Brown, "Compression of large area high current ion beams by an electrostatic plasma lens," Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At., vol. 243, no. 1, pp. 227-231, Jan. 2006.
16. A. Goncharov and I. Litovko, "Electron vortexes in high current plasma lens," IEEE Trans. Plasma Sci., vol. 27, no. 4, pp. 1073-1078, Aug. 1999.
17. Y. Chekh, A. Goncharov, and I. Protsenko, "Experimental observation of large-scale electron vortex structures in the electrostatic plasma lens," in Proc. XXII ISDEIV, Matsue, Japan, 2006, pp. 634-637.
18. A. Goncharov, V. Maslov, and I. Onishchenko, "Vortex electron dynamics in a high-current plasma lens," Plasma Phys. Rep., vol. 30, no. 8, pp. 662-670, Aug. 2004.
19. Y. Chekh, A. Goncharov, and I. Protsenko, "Large-scale electron vortex structure formation in a plasma lens," Tech. Phys. Lett., vol. 32, no. 1, pp. 51-54, Jan. 2006.
20. A. Goncharov, V. Maslov, and I. Brown, "Enhancement of ion beam charge states by electron vortices in a plasma optical device," Probl. Atom. Sci. Technol., Ser.: Plasma Phys., vol. 10, no. 1, pp. 134-136, 2005.
21. A. V. Vodopyanov, S. V. Golubev, V. G. Zorin, S. V. Razin, A. V. Vizir, A. G. Nikolaev, E. M. Oks, and G. Y. Yushkov, "Multiple ionization of metal ions by ECR heating of electrons in vacuum arc plasmas," Rev. Sci. Instrum., vol. 75, no. 5, pp. 1888-1890, May 2004.
22. J. A. Thornton and A. S. Penfold, Thin Film Processes. New York: Academic, 1978.
23. D. A. Glocker, M. M. Romach, and V. W. Lindberg, "Recent developments in inverted cylindrical magnetron sputtering," Surf. Coat. Technol. vol. 146/147, pp. 457-462, 2001.
24. A. Goncharov and I. Brown, "Novel plasma generation devices based on the plasma lens," in Proc. XXI ISDEIV, Yalta, Crimea, 2004, vol. 2, pp. 553-554.