Novel plasma generation devices based on the plasma lens

Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 2004, Pages 554-556

  Goncharov, A ^a   Brown, I ^b  

^a INSTITUTE OF HYDROBIOLOGY   (Ukraine)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION CLEANING; PLASMA GENERATION DEVICES; PLASMA LENS; PLASMA OPTICS PRINCIPLES;

CURRENT DENSITY; ELECTRIC POTENTIAL; ETCHING; ION BEAMS; ION IMPLANTATION; LENSES; SURFACE TREATMENT;

PLASMA DEVICES;

EID: 16244387171     PISSN: 10932941     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DEIV.2004.1422674     Document Type: Conference Paper

References (6)

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3. A. Goncharov, I.Protsenko, G. Yushkov and I. Brown, Appl.Phys. Lett., 75(7), 911 (1999).
4. A. Goncharov, I. Protsenko, G. Yushkov and I. Brown IEEE Trans. Plasma Sci., 28(6), 2238 (2000).
5. A. Goncharov, I. Protsenko, G. Yushkov, O. Monteiro, and I. Brown, Surf. Coat. Technol. 128-129, 15, (2000).
6. A. Goncharov, V. Gorshkov, S. Gubarev, A. Dobrovosky, I. Protsenko and I. Brown, Rev. Sci. Instrum., 73(2), 1001 (2002).