Diagnostic study of low-pressure Ar-O2 remote plasma generated in HCD-L 300 system: Relative density of O atom

Vacuum

Volumn 82, Issue 1, 2007, Pages 66-71

  Saloum, S ^a   Naddaf, M ^a  

^a DEPARTMENT OF MOLECULAR BIOLOGY AND BIOTECHNOLOGY   (Syrian Arab Republic)

Author keywords

Double Langmuir probe; Emission spectroscopy; Oxygen dissociation; Plasma kinetics; RF hollow cathode discharges

Indexed keywords

ARGON; DISSOCIATION; ELECTRIC DISCHARGES; GROUND STATE; KINETICS; OPTICAL EMISSION SPECTROSCOPY; OXYGEN;

DOUBLE LANGMUIR PROBES; HOLLOW CATHODE DISCHARGES; OXYGEN DISSOCIATION; PLASMA KINETICS;

PLASMA DIAGNOSTICS;

EID: 34548219405     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.04.031     Document Type: Article

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