Characterization of atomic oxygen from an ECR plasma source

Plasma Sources Science and Technology

Volumn 11, Issue 4, 2002, Pages 361-367

  Naddaf, M ^a   Bhoraskar, V N ^a   Mandale, A B ^b   Sainkar, S R ^b   Bhoraskar, S V ^a  

^a UNIVERSITY OF PUNE   (India)

^b NATIONAL CHEMICAL LABORATORY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; ELECTRON CYCLOTRON RESONANCE; GRAVIMETRIC ANALYSIS; OXIDATION; OXYGEN; PRESSURE EFFECTS; SILVER; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA CHAMBERS;

PLASMA SOURCES;

EID: 0036860750     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/11/4/301     Document Type: Article

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