Ultrasonic phased-array sensor using PZT thin film and three-dimensional object detection using BBD

Journal of the Korean Physical Society

Volumn 42, Issue SUPPL., 2003, Pages

  Yamashita, Kaoru ^a   Murakami, Hideyuki ^a   Okuyama, Masanori ^a   Tanaka, Tsunehisa ^b   Mo, Yaowu ^b   Tsuchitani, Akira ^b   Suzuki, Yoshihiko ^b   Arita, Shigeru ^c  

^a OSAKA UNIVERSITY   (Japan)

^b OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

^c Osaka Industrial Promotion Organization   (Japan)

Author keywords

Array sensor; BBD; Frequency tunning; Micromachining; Phase Array; Three dimensional measurement; Ultrasound

Indexed keywords

EID: 21744439925     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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