Preparation of high laser induced damage threshold antireflection film using interrupted ion assisted deposition

Optics Express

Volumn 15, Issue 17, 2007, Pages 10753-10760

  Zhang, Da Wei ^a   Huang, Yuan Shen ^a   Ni, Zheng Ji ^a   Zhuang, Song Lin ^a   Shao, Jian Da ^b   Fan, Zheng Xiu ^b  

^a UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY   (China)

^b SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; LASER DAMAGE; RESIDUAL STRESSES;

ANTIREFLECTION FILM; ELECTRON BEAM EVAPORATION; ION ASSISTED DEPOSITION;

OPTICAL FILMS;

EID: 34548074506     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.010753     Document Type: Article

References (14)

1. 2 films with high laser damage threshold," Thin Solid Films 358, 250-258 (2000).
2. 2 dielectric mirrors," Appl. Surf. Sci. 210, 353-358 (2003).
3. 2 anti-reflective films," Appl. Surf. Sci. 245, 335-339 (2005).
4. P. J. Martin, "Review of ion-based methods for optical film deposition," J. Mater. Sci. 21, 1-25 (1986).
5. 2 thin films," Thin Solid Films 396, 44-52 (2001).
6. 2.x films with cubic and tetragonal structures obtained by ion beam assisted deposition," J. Vac. Sci. Technol. A 20, 549-554 (2002).
7. C. J. Stolz, F. Y. Genin and M. R. Kozlowski, "Influence of microstructure on laser damage threshold of IBS films," Proc. SPIE 2714, 351-359 (1996).
8. N. J.Bazin, J. E. Andrew, H. A. McInnes, and A. J. Morris, "Temperature effects on the LIDT of single- and multilayer sol-gel-derived thin film films," Proc. SPIE 4347, 127-138 (2000).
9. 2 films- some key points for high power laser applications," J.Vac. Sci.Technol. A18, 2372-2377 (2000).
10. S. Wu and N. J. Dovichi, "Fresnel diffraction theory for steady-state thermal lens measurements in thin films," J. Appl. Phys. 67, 1170-1182 (1990).
11. S. Fan, H. He, J. Shao, Z. Fan, and D. Zhang, "Absorption measurement for films using surface thermal tensing technique," Proc. SPIE 5774, 531-534 (2004)
12. 2 multilayers deposited on different substrates with different thickness periods," Opt. Lett. 30, 2119-2121 (2005).
13. ISO 11254-1:2000: Lasers and laser-related equipment -- Determination of laser-induced damage threshold of optical, surfaces -Part 1: 1-on-1 test
14. 2 Thin Films on Its Laser-induced Damage Threshold," Acta Photonica Sin. 34, 176-179 (2005).