Evaporation and ion assisted deposition of HfO2 coatings: Some key points for high power laser applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2372-2377

  Andre, B ^a   Poupinet, L ^a   Ravel, G ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; FILM GROWTH; HAFNIUM COMPOUNDS; LASER APPLICATIONS; LASER BEAMS; OPTICAL COATINGS; OPTICAL PROPERTIES; SILICA; STOICHIOMETRY;

LASER INDUCED DAMAGE THRESHOLD (LIDT);

OPTICAL FILTERS;

EID: 0034272653     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1287153     Document Type: Article

References (22)

1. H. A. Macleod, Thin Films for Optical Systems, edited by F. R. Flory (Marcel Dekker, New York, 1995), pp. 1-39.
2. J. D. Rancourt, Optical Thin Films User Handbook (SPIE, Bellingham, WA, 1996).
3. M. R. Kozlowski, in Ref. 1, pp. 521-549.
4. A. J. Waldorf, J. A. Dobrowolski, B. T. Sullivan, and L. M. Plante, Appl. Opt. 32, 5583 (1993).
5. B. Brauns et al., Sov. J. Quantum Electron. 18, 1286 (1988).
6. L. L. Chase, A. V. Hamza, and H. W. H. Lee, J. Appl. Phys. 71, 1204 (1992).
7. L. G. Parrat, Phys. Rev. 5, 359 (1954).
8. G. G. Stoney, Proc. Roy. Soc. A81, 172 (1909).
9. J. Hue, P. Garrec, J. Dijon, and P. Lyan, Proc. SPIE 2714, 90 (1996);
10. J. Hue, J. Dijon, and P. Lyan, Proc. SPIE 2714, 102 (1996).
11. R. J. Tench, R. Chow, and M. R. Kozlowski, J. Vac. Sci. Technol. A 12, 2808 (1994).
12. R. Chow, S. Falabella, G. E. Loomis, F. Rainer, C. J. Stolz, and M. R. Kozlowski, Appl. Opt. 32, 5567 (1993).
13. J. Dijon, G. Ravel, and B. Andre, Proc. SPIE 3578, 398 (1999).
14. B. A. Movchan and A. V. Demchishin, Fiz. Met. Metalloved. 28, 653 (1969).
15. K. H. Muller, Surf. Sci. 184, 375 (1987).
16. H. Sankur and W. Gunning, J. Appl. Phys. 66, 807 (1989).
17. H. Leplan, Thèse de l'Institut National Polytechnique de Grenoble, 1995.
18. J. M. E. Harper, J. J. Cuomo, J. J. Gambino, and H. R. Kaufman, in Ion Beam Bombardment of Surfaces, edited by O. Aucielloand and R. Kelly (Elsevier, New York, 1984), Chap. 4.
19. S. M. Rosnagel and J. J. Cuomo, MRS Bull. Feb.-March, 40 (1987).
20. 18 edited by S. M. Rosnagel, J. J. Cuomo and H. R. Kaufman (Noyes, Park Ridge, NJ, 1989), Part 3.
21. D. M. Mattox, J. Vac. Sci. Technol. A 7, 1105 (1989).
22. K. H. Müller, Phys. Rev. B 35, 7906 (1987).