The use of non-contact AFM with nanoindentation techniques for measuring mechanical properties of carbon nitride thin films

Applied Surface Science

Volumn 233, Issue 1-4, 2004, Pages 219-226

  Chowdhury, S ^a   Laugier, M T ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

AFM imaging; Carbon nitride thin films; Nanoindentation

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; COATINGS; DEPOSITION; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; NANOTECHNOLOGY; SUBSTRATES;

AFM IMAGING; CARBON NITRIDE THIN FILMS; CONTACT AREAS; NANOINDENTATION;

THIN FILMS;

EID: 2942592589     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.03.255     Document Type: Article

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