Mechanical and optical properties of diamond-like carbon thin films deposited by low temperature process

Thin Solid Films

Volumn 498, Issue 1-2, 2006, Pages 220-223

  Su, C H ^a   Lin, C R ^a   Chang, C Y ^a   Hung, H C ^a   Lin, T Y ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Diamond like carbon (DLC); Polycarbonate (PC); Unbalanced magnetron sputtering system (UBM)

Indexed keywords

ADHESIVES; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSTRIP ANTENNAS; OPTICAL PROPERTIES; POLYCARBONATES; PROTECTIVE COATINGS; SILICON; THIN FILMS;

DIAMOND-LIKE CARBON (DLC); PLASTIC CASE; RADIO FREQUENCY (R.F.); UNBALANCED MAGNETRON SPUTTERING SYSTEM (UBM);

DIAMOND LIKE CARBON FILMS;

EID: 30944438277     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.093     Document Type: Conference Paper

References (6)

1. N.K. Coung, and M. Tahara Surf. Coat. Technol. 174-175 2003 1024
2. K. Inagawa, T. Zeniya, and N. Hibino Surf. Coat. Technol. 169-170 2003 344
3. F. Rossi, B. Andre, and A.V. Veen J. Mater. Res. 9 1994 244
4. H.-P. Kaukonen, and R.M. Nieminen Phys. Rev. Lett. 68 1992 620
5. J.A. Thornton J. Vac. Sci. Technol. 11 1974 666
6. Y. Lifshitz, and A. Breskin Diamond Relat. Mater. 6 1997 687