Piezoresistive effect in DLC films and silicon

2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings

Volumn 3, Issue , 2007, Pages 17-20

  Tibrewala, Arti ^a   Phataralaoha, Anurak ^a   Peiner, Erwin ^b   Bandorf, Ralf ^c   Büttgenbach, Stephanus ^a  

^a Institute for Microtechnology   (Germany)

^b Institute for Communications Technology   (Germany)

^c FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

3D; Boss membrane; Force measurement; Hydrogenated amorphous carbon; Tactile sensor

Indexed keywords

AMORPHOUS MATERIALS; FORCE MEASUREMENT; PIEZOELECTRIC ACTUATORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

BOSS MEMBRANES; HYDROGENATED AMORPHOUS CARBON; TACTILE SENSORS;

DIAMOND LIKE CARBON FILMS;

EID: 34547971574     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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