Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 1922-1928

  Misina M ^a,b   Setsuhara, Y ^a   Miyake, S ^a  

^a OSAKA UNIVERSITY   (Japan)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031522452     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580660     Document Type: Article

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