Development of internal-antenna-driven large-volume RF plasma sources for plasma-based ion implantation

Surface and Coatings Technology

Volumn 136, Issue 1-3, 2001, Pages 60-64

  Setsuhara, Yuichi ^a   Miyake, Shoji ^a   Sakawa, Yoichi ^b   Shoji, Tatsuo ^b  

^a OSAKA UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; ELECTROSTATICS; HYDROGEN; ION IMPLANTATION; NITROGEN; PLASMA DENSITY;

INTERNAL ANTENNA; PLASMA-BASED ION IMPLANTATION (PBII);

PLASMA SOURCES;

EID: 0035254247     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01060-4     Document Type: Article

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