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Volumn 59, Issue 2-3, 2000, Pages 472-478

Internal-antenna-driven inductive RF discharges for development of large-area high-density plasma sources with suppressed electrostatic coupling

Author keywords

ICP; Internal antenna; Large diameter plasma

Indexed keywords


EID: 0041702354     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00304-3     Document Type: Article
Times cited : (8)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.