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Volumn 59, Issue 2-3, 2000, Pages 472-478
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Internal-antenna-driven inductive RF discharges for development of large-area high-density plasma sources with suppressed electrostatic coupling
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Author keywords
ICP; Internal antenna; Large diameter plasma
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Indexed keywords
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EID: 0041702354
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/s0042-207x(00)00304-3 Document Type: Article |
Times cited : (8)
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References (10)
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