Electron spectroscopy of COx magnetron sputtered films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 B, 2006, Pages 8412-8417

  Zemek, J ^a   Bohac, P ^a   Kulikovsky, V ^a,b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

Author keywords

Carbon oxide films; Chemical bonding; Electron energy loss spectroscopy (EELS); X ray induced auger electron spectroscopy (XAES); X ray photoelectron spectroscopy (XPS)

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CHEMICAL BONDS; ELECTRON ENERGY LOSS SPECTROSCOPY; GRAPHITE; MAGNETRON SPUTTERING; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON OXIDE FILMS; ELEVATED TEMPERATURE; OXYGEN CONTENT; SURFACE REGIONS;

CARBON MONOXIDE;

EID: 34547870946     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.8412     Document Type: Article

References (35)

1. D. Camino, A. H. S. Jones, D. Mercs and D. G. Teer: Vacuum 52 (1999) 125.
2. Y. Lifshitz: Diamond Relat. Mater. 5 (1996) 388.
3. V. Kulikovsky, P. Boháč, F. Franc, A. Deineka, V. Vorlíček and L. Jastrabik: Diamond Relat. Mater. 10 (2001) 1076.
4. V. Kulikovsky, V. Vorlíček, P. Boháč, A. Kurdyumov, A. Deyneka and L. Jastrabik: Diamond Relat. Mater. 12 (2003) 1378.
5. R. G. Lacerda, P. Hammer, F. L. Freire, Jr., F. Alvarez and F. C. Marques: Diamond Relat. Mater. 9 (2000) 796.
6. A. Y. Liu and M. L. Cohen: Science 245 (1989) 841.
7. A. M. Mezzasalma, G. Mondio, F. Neri and S. Trusso: J. Phys. D 36 (2003) 541.
8. I. Jimenez, R. Gago, J. M. Albella, D. Caceres and I. Vergara: Phys. Rev. B 62 (2000) 4261.
9. M. C. dos Santos and F. Alvarez: Phys. Rev. B 58 (1998) 13918.
10. H. Sjostrom, S. Stafstrom, M. Boman and J. E. Sungren: Phys. Rev. Lett. 75 (1995) 1336.
11. P. B. Leezenberg, W. H. Johnston and G. W. Tyndall: J. Appl. Phys. 89 (2001) 3498.
12. G. Adamopoulos, C. Godet, T. Zorba, K. M. Paraskevopoulos and D. Ballutaud: J. Appl. Phys. 96 (2004) 5456.
13. V. Kulikovsky, V. Vorlíček, P. Boháč, J. Zemek, A. Kurdyumov and L. Jastrabík: Appl. Phys. A 78 (2004) 393.
14. J. H. Scofield: J. Electron Spectrosc. Relat. Phenom. 8 (1976) 129.
15. S. Tanuma, C. J. Powell and D. R. Penn: Surf. Interface Anal. 37 (2005) 1.
16. P. Jiricek: Czech. J. Phys. 44 (1994) 261.
17. G. Beamson and D. Briggs: High Resolution XPS of Organic Polymers, The Scienta ESCA300 Database (Wiley, Chichester, U.K., 1992).
18. J. F. Moulder, W. F. Stickle, P. E. Sobol and K. D. Bomben: Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer, Eden Prairie, MN, 1992).
19. J. C. Lascovich, R. Giorgi and S. Scaglione: Appl. Surf. Sci. 47 (1991) 17.
20. J. C. Lascovich and S. Scaglione: Appl. Surf. Sci. 78 (1994) 17.
21. J. Zemek, J. Zalman and A. Luches: Appl. Surf. Sci. 133 (1998) 27.
22. J. Fink, T. Muller-Heinzerling, J. Pfluger, A. Bubenzer, P. Koidl and G. Crecelius: Solid State Commun. 47 (1983) 687.
23. J. Zemek, S. Hucek, A. Jablonski and I. S. Tilinin: J. Electron Spectrosc. Relat. Phenom. 76 (1995) 443.
24. D. E. Ramaker: J. Vac. Sci. Technol. A 7 (1989) 1614.
25. A. A. Galuska, H. H. Madden and R. E. Allred: Appl. Surf. Sci. 32 (1988) 253.
26. E. Desimoni, A. M. Salvi, I. G. Casella and D. Damiano: Surf. Interface Anal. 20 (1993) 909.
27. A. P. Dementjev, M. N. Petukhov and A. M. Baranov: Diamond Relat. Mater. 7 (1998) 1534.
28. G. Francz, P. Reinke, P. Oelhafen and W. Hanni: Thin Solid Films 270 (1995) 200.
29. S. Turgeon and R. W. Paynter: Thin Solid Films 394 (2001) 44.
30. J. Nord, K. Nordlund and J. Keinonen: Phys. Rev. B 65 (2002) 165329.
31. Y. Fan, A. G. Fitzgerald, P. John, C. E. Troupe and J. I. B. Wilson: Surf. Interface Anal. 34 (2002) 703.
32. Z. Klusek, Z. Waquar, W. Kozlowski, P. Kowalczyk, E. Denisov, I. Makarenko, T. Kompaniets, A. N. Titkov and P. K. Datta: Appl. Surf. Sci. 187 (2002) 28.
33. Z. Klusek: Appl. Surf. Sci. 125 (1998) 339.
34. H. Raether: Excitation of Plasmons and Interband Transitions by Electrons (Springer, New York, 1980) Springer Tracts in Modern Physics, Vol. 38.
35. J. Kulik, Y. Lifshitz, G. D. Lempert, J. W. Rabalais and D. Marton: J. Appl. Phys. 76 (1994) 5063.